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Apparatus for manufacturing flat-panel display

a technology for flat-panel displays and apparatuses, which is applied in the direction of positioning apparatuses, manufacturing tools, metal-working machine components, etc., can solve the problems of increasing the size of vacuum chambers included in the equipment provided, and the substrate to be processed by the fdp manufacturing apparatus has been recently increased, so as to achieve the effect of easy opening/closing of the upper cover

Inactive Publication Date: 2006-04-06
ADVANCED DISPLAY PROCESS ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention provides an FPD manufacturing apparatus that can easily open and close an upper cover. This is achieved through the use of a vacuum chamber with a separable upper cover, sealing means to seal the chamber, rotating units to rotate the upper cover, horizontal drive units to support and move the upper cover, track units to provide a movement path for the horizontal drive units, and processor units to perform a desired process on an object in the vacuum chamber. Additionally, the invention provides an upper cover opening / closing device that can pivotally rotate the upper cover along a parabolic orbit. The technical effects of the invention include improved efficiency and convenience in the manufacturing process, as well as improved safety and reliability.

Problems solved by technology

Due to the fact that a variety of gases or plasma is used in the processing chamber, equipment provided in the processing chamber may be damaged or polluted if a great number of processes are repeated and, thus, it is necessary to periodically exchange or repair the equipment.
However, the size of a substrate to be processed by the FDP manufacturing apparatus has been recently increased, and accordingly, the size of vacuum chambers included in the FDP manufacturing apparatus is rapidly increasing.
Furthermore, the bulky upper cover exhibits an increase in the lack of stability when it is vertically lifted, adversely affecting maintenance and repair in the interior of the vacuum chamber.

Method used

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  • Apparatus for manufacturing flat-panel display
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  • Apparatus for manufacturing flat-panel display

Examples

Experimental program
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Effect test

first embodiment

[0038] Referring to FIGS. 3 and 4 illustrating an FPD manufacturing apparatus according to a first embodiment of the present invention, the FPD manufacturing apparatus 100 of the first embodiment comprises: a vacuum chamber 110; sealing means 120; a rotating unit 130; a horizontal drive unit 140; a track unit 150; and processor units 160 and 170.

[0039] The vacuum chamber 110 is designed to establish a vacuum atmosphere therein. In the present embodiment, the vacuum chamber 110 is divided into a chamber body 114 and an upper cover 112. The chamber body 114 forms a lower chamber section of the vacuum chamber 110, and is constituted by a bottom wall and a sidewall vertically extending upward from the periphery of the bottom wall. The upper cover 112 forms an upper chamber section of the vacuum chamber 110, and is constituted by a top wall and a sidewall vertically extending downward from the periphery of the top wall. As the upper cover 112 is coupled with the chamber body 114, the va...

second embodiment

[0061] An FPD manufacturing apparatus according to the present embodiment comprises: a vacuum chamber; sealing means; and processor units. In the same manner as the first embodiment, the vacuum chamber includes a chamber body and an upper cover, and the sealing means is configured to seal rims of the chamber body and the upper cover. The processor units are arranged in the vacuum chamber to perform a desired process for a substrate. The configurations and functions of the vacuum chamber, sealing means, and processor units are identical to those of the first embodiment, and accordingly, no further description will be given.

[0062] Differently from the first embodiment, the FPD manufacturing apparatus of the present embodiment is not provided with the rotating units, horizontal movement units, and track units. The upper cover of the present embodiment is spaced apart from the chamber body by a predetermined distance by use of separate supporting members. The supporting members are cou...

third embodiment

[0065] Referring to FIG. 7 illustrating an FPD manufacturing apparatus 200 according to the third embodiment of the present embodiment, the FPD manufacturing apparatus 200 comprises a lower chamber 210; an upper chamber 220; a horizontal drive unit 230; and a rotating unit 240. The lower and upper chambers 210 and 220 have downwardly inclined coupling surfaces, which extend in a movement direction of the upper chamber 220. That is, the coupling surfaces of both the lower and upper chambers 210 and 220 are inclined in a specific direction, i.e. are inclined downwardly in the movement direction of the upper chamber 220, rather than being horizontally parallel to the ground surface. With the inclined coupling surfaces of the lower and upper chambers 210 and 220, the upper chamber 220 can be easily separated from the lower chamber 210 as it horizontally slides on the lower chamber 210 without friction therebetween. This eliminates the necessity of lifting the upper chamber 220 by a pred...

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Abstract

Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening / closing operations of the upper cover.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to an apparatus for manufacturing a flat-panel display (FPD), which can perform a desired process for an FPD substrate after establishing a vacuum atmosphere therein, and, more particularly, to an FPD manufacturing apparatus in which a vacuum chamber is divided into a chamber body and an upper cover, whereby the upper cover can be easily opened and closed. [0003] 2. Description of the Related Art [0004] Flat-panel display (FPD) manufacturing apparatuses are designed to feed an FPD substrate thereinto and to perform a desired process, such as an etching process, for the FPD substrate by use of plasma, etc. Examples of FPDs include LCDs, PDPs, OLEDs, etc. Among such FPD manufacturing apparatuses, a general vacuum processing apparatus comprises three vacuum chambers including a load lock chamber, a transfer chamber, and a processing chamber. [0005] The load lock chamber is used to receive ...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): B23Q1/25B23Q3/00
CPCB23Q11/0891H01L21/6719
Inventor LEE, YOUNG JONGCHOI, JUN YOUNGJO, SAENG HYUNAHN, HYUN HWANSON, SUK-MINAHN, SUNG IL
Owner ADVANCED DISPLAY PROCESS ENG
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