Scanning electron microscope with measurement function
a scanning electron microscope and function technology, applied in the direction of instruments, semiconductor/solid-state device testing/measurement, nuclear engineering, etc., can solve the problems of difficult to check, troublesome to revise and check stored amp data, etc., and achieve the effect of efficient and easy measuremen
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[0035] Next, preferred embodiments of the present invention will be described referring to the accompanying drawings.
[0036]FIG. 15 shows the general structure of a scanning electron microscope with a measurement function according to an embodiment of the present invention (see Patent Document 1). An electron beam 2 emitted from an electron gun 1 is narrowed by an objective lens 6 and thrown on a sample 7. The objective lens 6 is excited by an objective lens power supply 11. A deflecting signal generator 14 sends a deflecting signal depending on a scanning area or scanning position of the electron beam 2 as indicated by a computer 21 through a deflecting amplifier 10 to a deflecting coil 5 to excite it so that the sample 7 is scanned with the electron beam 2 two-dimensionally.
[0037] A secondary signal (secondary electron signal, reflection electron signal, etc.), which is generated from the sample 7 in response to irradiation of the electron beam 2, is detected by a detector 12 and...
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