Transport apparatus

a technology for transporting equipment and moving parts, applied in the direction of transportation and packaging, motor wheels, manufacturing tools, etc., can solve problems such as jamming, and achieve the effect of shortening the tim

Inactive Publication Date: 2007-08-23
ASYST SHINKO INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0008] The invention is accomplished in view of the above problems. An object of the present invention is to

Problems solved by technology

Thus, since it takes a long time to change the direction of the single carrier, a

Method used

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Embodiment Construction

[0047] Exemplary embodiments of the present invention will hereinafter be described in detail by reference to the accompanying drawings.

(Configuration of the Transport Apparatus 1)

[0048] As shown in FIG. 1, the transport apparatus 1 includes a transport track 2 for guiding a carrier 8, which is an article to be transported. The transport track 2 is configured by suitably combining linear portions 2a, corner portions 2b, branch portions 2c and join portions 2d. Not-shown stockers etc. for temporarily keeping the carriers are disposed at the periphery of the transport track 2.

[0049] First, the explanation will be made as to the linear portion 2a and the corner portion 2b of the transport track 2 with reference to FIG. 2. As shown in FIG. 2, the linear portion 2a of the transport track 2 is provided with a main track 3 for guiding the carrier 8 in the straight line direction, and the corner portion 2b of the transport track 2 is provided with a corner track 4 for changing the trave...

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Abstract

A branch portion 2c is provided with a branch track 6 for guiding a carrier 8 having been guided in a straight line direction so as to change the traveling direction thereof, and a linear track 5 for guiding the carrier in the straight line direction. A switching unit switches between the branch track 6 and the linear track 5 so as to guide the carrier 8 by one of the branch track 6 and the linear track 5 in accordance with the traveling direction of the carrier 8.

Description

[0001] This application claims priority from Japanese Patent application No. 2006-043573, filed Feb. 21, 2006, the contents of which is incorporated herein by reference in its entirety. BACKGROUND OF THE INVENTION [0002] 1. Field of the Invention [0003] The present invention relates to a transport apparatus for transporting an article to be transported. [0004] 2. Description of the Related Art [0005] In a manufacturing factory such as a semiconductor manufacturing factory or a liquid crystal display panel manufacturing factory, it is known that a transport system using a transport conveyer, an Over head Hoist Transport (OHT), an Over Head Shuttle (OHS) and so on transports a carrier which houses therein articles in the manufacturing process in accordance with a process. Further, the articles in the manufacturing may include subjects to be processed such as semiconductor substrates, glass substrates for liquid crystal display apparatuses, glass substrates for photo masks or substrate...

Claims

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Application Information

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IPC IPC(8): B65G13/02
CPCB65G13/10H01L21/6773H01L21/67715B65G47/643B24C3/06B24C5/06B24C9/00
Inventor KYUTOKU, SENZOTSUBAKI, TATSUOMURATA, MASANAO
Owner ASYST SHINKO INC
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