Nonvolatile Memory Device and Method of Manufacturing the Same

Abstract

A method of manufacturing a nonvolatile memory device wherein first gate lines and second gate lines are formed over a semiconductor substrate. The first gate lines are spaced-from each other at a first width, the second gate lines are spaced-from each other at a second width, and the first width is wider than the second width. A first ion implantation process of forming first junction regions in the semiconductor substrate between the first gate lines and the second gate lines is performed. A second ion implantation process of forming second junction regions in the respective first junction regions between the first gate lines is then performed.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This is a division of U.S. application Ser. No. 12 / 562,727 filed Sep. 18, 2009, which claims the priority benefit under USC 119 of KR 10-2008-0091987 filed Sep. 19, 2008, KR 10-2008-0133107 filed Dec. 24, 2008, and KR 10-2009-0045402 filed May 25, 2009, the entire respective disclosures of which are incorporated herein by reference.BACKGROUND[0002]Embodiments of the disclosure relate generally to a nonvolatile memory device and a method of manufacturing the same, and more particularly, to the junction regions of a nonvolatile memory device.[0003]In a nonvolatile memory device, memory cells for storing data are interconnected in series within the same string. The memory cells are electrically interconnected through junction regions within the same string.[0004]FIG. 1 is a sectional view of a known nonvolatile memory device.[0005]The nonvolatile memory device of FIG. 1 may be implanted by forming a number of gate lines on a semiconductor su...

AI Technical Summary

Benefits of technology

[0015]According to one or more embodiments, deterioration of the electrical properties of junction regions can be prohibited, and a process of forming the junction regions can be simplified.

Problems solved by technology

However, there is a limit to an increase of the distance between the source select line SSL and the adjacent first word line WL0 because of the degree of integration of nonvolatile memory devices.

Consequently, there is a problem in that a process of forming junction regions is complicated because the mask process must be repeatedly performed as many as the number of transistors including different junction regions.

Furthermore, to manufacture a nonvolatile memory device, a large number of unit processes must be performed.

Accordingly, a process of forming and removing ion implantation masks for selectively opening the junction regions must be performed several times. However, the process of forming and removing the ion implantation masks causes to increase the process expenses and the turn-around time.

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