Substrate treatment apparatus and substrate treatment method
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[0084]In the first embodiment, as described above, the treatment liquid droplets are spouted from the liquid droplet nozzle 5 toward the upper surface of the substrate W horizontally held by the spin chuck 2. Thus, the treatment liquid droplets are sprayed on the spouting regions T1 on the upper surface of the substrate W. Simultaneously with the spouting of the treatment liquid from the liquid droplet nozzle 5, the protective liquid is spouted from the protective liquid nozzle 6 toward the upper surface of the substrate W. The protective liquid spouted from the protective liquid nozzle 6 impinges on the substrate W to be deflected, and spreads on the substrate W to flow toward the spouting regions T1 on the upper surface of the substrate W. The protective liquid spreading on the substrate W flows into the spouting regions T1 against the treatment liquid droplets sprayed on the spouting regions T1. That is, flow speed control conditions including at least one of the spouting speed o...
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[0091]Next, a second embodiment of the present invention will be described. In FIG. 15, components corresponding to those shown in FIGS. 1 to 14 will be designated by the same reference characters as in FIGS. 1 to 14, and duplicate description will be omitted.
[0092]FIG. 15 is a schematic side view of a liquid droplet nozzle 205 and a protective liquid nozzle 6 according to the second embodiment of the present invention.
[0093]A substrate treatment apparatus 201 according to the second embodiment has substantially the same construction as the substrate treatment apparatus 1 according to the first embodiment, except for the liquid droplet nozzle. That is, the substrate treatment apparatus 201 includes liquid droplet nozzles 205, instead of the liquid droplet nozzle 5 according to the first embodiment, which generates treatment liquid droplets to be sprayed on spouting regions T201. In the second embodiment, the substrate treatment apparatus 201 includes two liquid droplet nozzles 205. ...
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