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Thin-film piezoelectric material element having a solder regulating part formed on a pad surface being a surface of an electrode pad

Active Publication Date: 2018-05-17
TOSHIBA ELECTRONICS DEVICES & STORAGE CORPORARTION +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention aims to improve the reliability of connecting thin-film piezoelectric material elements and flexure parts using solder. This can be useful in thin-film piezoelectric material elements used in hard disk drives and head gimbal assemblies.

Problems solved by technology

However, the following problems, caused by forms of the regulating parts, have not been solved, in the conventional thin-film piezoelectric material element.

Method used

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  • Thin-film piezoelectric material element having a solder regulating part formed on a pad surface being a surface of an electrode pad
  • Thin-film piezoelectric material element having a solder regulating part formed on a pad surface being a surface of an electrode pad
  • Thin-film piezoelectric material element having a solder regulating part formed on a pad surface being a surface of an electrode pad

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modified example

[0093]It is possible that the thin-film piezoelectric material element 22 has the solder regulating parts 135 instead of the above-described solder regulating parts 30. The solder regulating parts 135 are different from the solder regulating parts 30 in that the solder regulating parts 135 have the crossing edge parts 134 instead of the crossing edge parts 33, as illustrated in FIG. 11.

[0094]The crossing edge parts 134 do not have the flat parts 32 like the crossing edge parts 33, and the crossing edge parts 134 are composed of entirely curved surfaces which connect the outer edge parts 34a with the outer edge parts 34b. The crossing edge parts 134 are also warped in a bow shape with a receding direction from the shortest lines 36, and the crossing edge parts 134 are formed in a bow like curve-shape, similar with the crossing edge parts 33.

[0095]Because unevenness of surface density, about the solder applied on the electrode pads 29, does not appear, when the thin-film piezoelectric...

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Abstract

A thin-film piezoelectric material element includes a piezoelectric part having a laminated structure which a lower electrode film, a piezoelectric material film and an upper electrode film are laminated sequentially, and electrode pads connected with the piezoelectric part. The thin-film piezoelectric material element has solder regulating parts formed on pad surfaces being surfaces of the electrode pads. The solder regulating parts have peripheral edge parts and crossing edge parts connected with the two outer edge parts, and formed to cross the pad surfaces. The crossing edge parts are formed in a bow like curve-shape having curved parts, being gradually distant from the shortest line as they are distant more from the outer edge parts.

Description

BACKGROUNDField of the Invention[0001]The present invention relates to a thin-film piezoelectric material element which has a piezoelectric material and electrodes having thin-film like shape, a head gimbal assembly and a hard disk drive having the thin-film piezoelectric material element.Related Background Art[0002]A hard disk drive has a large recording capacity and is used as the heart of a storage device. The hard disk drive records and reproduces data to / from a hard disk (recording medium) by a thin-film magnetic head. A part, which the thin-film magnetic head is formed, is called as a head slider, and a part, which the head slider is mounted on the edge part, is a head gimbal assembly (will also be referred to as “HGA”).[0003]Further, recording and reproducing of data to / from the recording medium is performed by flying the head slider from a surface of the recording medium while rotating the recording medium, in the hard disk drive.[0004]On the other hand, it has become diffic...

Claims

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Application Information

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IPC IPC(8): G11B5/48H01L41/08
CPCG11B5/483G11B5/4853H01L41/29H01L41/096G11B21/106G11B5/596G11B5/4873H10N30/875H10N30/206H10N30/06H10N30/2045
Inventor MATONO, NAOTONISHIYAMA, KAZUSHINESORI, HIROFUMIKIDO, TAKUMA
Owner TOSHIBA ELECTRONICS DEVICES & STORAGE CORPORARTION
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