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Highly efficient microdevices

a micro-device, high-efficiency technology, applied in the direction of basic electric elements, electrical equipment, semiconductor devices, etc., can solve the problems of inefficient micro-devices, and achieve the effect of minimizing defects in epitaxial layers and sidewalls

Pending Publication Date: 2020-03-19
VUEREAL INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patent describes a new technology that can create microdevices with better quality layers and sidewalls. This technology also improves the efficiency of light emitting from these microdevices.

Problems solved by technology

In conventional approaches to fabricate microdevices, the main challenges are the native defects in the epitaxial layers and sidewalls that result in inefficient microdevices.

Method used

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Embodiment Construction

[0038]Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.

[0039]As used in the specification and claims, the singular forms “a”, “an” and “the” include plural references unless the context clearly dictates otherwise.

[0040]In this disclosure, the terms ‘nanostructures’, ‘nanopillars’, and ‘nanowires’ are used interchangeably. ‘Nanostructures’, ‘nanopillars’, and ‘nanowires’ may be defined as structures that have a thickness or diameter constrained to tens of nanometers or less and an unconstrained length.

[0041]In this disclosure, the terms ‘device’, ‘vertical device’ and ‘microdevice’ are used interchangeably.

[0042]Light Emitting Diodes (LED) and LED arrays can be categorized as vertical solid-state device. The microdevices may be sensors, LEDs, or any other solid devices grown, deposited, or monolithically fabricated on a substrate. The substrate may ...

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PUM

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Abstract

Methods and structures are disclosed for highly efficient vertical devices. The vertical device comprising a plurality of planar active layers formed on a substrate, at least one of a top layer of the plurality of the layers is formed as a plurality of nano-pillars and a passivation layer formed on a space between the plurality of the nanopillars.

Description

CROSS-REFERENCE TO RELATED APPLICATION(S)[0001]This application claims priority from U.S. Provisional Patent Application Nos. 62 / 733,434 filed on Sep. 19, 2018 and 62 / 793,017 filed on Jan. 16, 2019, which are incorporated herein by reference in their entirety.FIELD OF THE INVENTION[0002]The present disclosure relates to the development of high performance microdevices, and more particularly, to nano-pillar hybrid microdevices with improved light emitting efficiency.BACKGROUND OF THE INVENTION[0003]Light emitting diodes (LEDs) and LED arrays can be categorized as vertical solid-state device. The microdevices may be sensors, light emitting diodes (LEDs) or any other solid devices grown, deposited, or monolithically fabricated on a substrate. In conventional approaches to fabricate microdevices, the main challenges are the native defects in the epitaxial layers and sidewalls that result in inefficient microdevices. Thus, there is a need for improved fabrication techniques that mitigate...

Claims

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Application Information

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IPC IPC(8): H01L33/62H01L33/38H01L33/00
CPCH01L33/62H01L33/385H01L33/0075H01L33/20H01L33/14H01L33/44H01L33/0037H01L33/38H01L33/36H01L33/58H01L33/005
Inventor CHAJI, GHOLAMREZAFATHI, EHSANOLLAHLI, YUNHANSIBONI, HOSSEIN ZAMANI
Owner VUEREAL INC