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Layer thickness measurement method

a layer thickness and measurement method technology, applied in the field of layer thickness measurement method, can solve the problem of taking a long time for the measurement of the opaque layer thickness

Active Publication Date: 2017-03-14
TOYOTA JIDOSHA KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention provides a method to measure the thickness of an opaque layer in an opaque laminated body. This method ensures that the thickness of the first opaque layer can be measured accurately in a short period of time. Additionally, the method ensures that the thicknesses of all layers, including the solid electrolyte layer, can be measured without creating any through-holes that may compromise electrical insulation. This makes it possible to use the laminated battery material for a battery without discarding it, saving manufacturing costs. The method described in this patent is an efficient and effective way to measure the thickness of an opaque laminated battery material.

Problems solved by technology

According to the above-described measurement method disclosed in JP 2001-194117 A, however, the concave portion that penetrates the opaque layer needs to be formed and the transparent layer needs to be formed in the concave portion for the opaque layer thickness measurement, and much time is taken for the opaque layer thickness measurement.

Method used

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Examples

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example 1

[0051]Hereinafter, Example 1 of the invention will be described with reference to accompanying drawings. An opaque laminated body 10, which is an object to be measured according to this Example 1, will be described first. As illustrated in FIG. 1, the opaque laminated body 10 is an opaque laminated body in which four opaque layers are laminated in their thickness direction TD (vertical direction in FIG. 1). In the opaque laminated body 10, the opaque layers that are adjacent to each other in a laminating direction LD (vertical direction in FIG. 1) have different colors.

[0052]Specifically, the opaque laminated body 10 is a laminated battery material including a current collector 11, a first electrode mixture layer 12, a solid electrolyte layer 13, and a second electrode mixture layer 14 as illustrated in FIG. 1. The current collector 11 is an opaque layer. The first electrode mixture layer 12 is an opaque layer that is laminated on a surface 11b of the current collector 11. The solid...

example 2

[0076]Hereinafter, Example 2 of the invention will be described with reference to accompanying drawings. This Example 2 differs from Example 1 in that the thickness of every opaque layer constituting the opaque laminated body 10 is grasped and in that the depths of three portions to be removed are measured with regard to each opaque layer and the average value of the measured results is acquired as the thickness of each opaque layer. Example 2 is similar to Example 1 in the other aspects. Accordingly, the following description will focus on the differences from Example 1 while description of the similar aspects is omitted or simplified.

[0077]In this Example 2, the current collector 11 has the columnar portion to be removed 11A that is positioned across the entire thickness of the current collector 11 (refer to FIGS. 2 and 3). This portion to be removed 11A is a region that is to be removed (ablated) by pulse laser PL applying (described later). Likewise, the first electrode mixture ...

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Abstract

Provided is a fifth step for obtaining a removal depth of a second electrode mixture layer (first opaque layer) corresponding to an integrated value from the integrated value of the value corresponding to the number of applying pulses integrated thus far, based on a correlation between the value corresponding to the number of applying pulses of pulse laser and the removal depth of the second electrode mixture layer grasped in advance, once it is determined that a white light applying target has changed from the second electrode mixture layer to a solid electrolyte layer (second opaque layer) and acquiring the removal depth as a thickness of the second electrode mixture layer.

Description

INCORPORATION BY REFERENCE[0001]The disclosure of Japanese Patent Application No. 2015-098052 filed on May 13, 2015 including the specification, drawings and abstract is incorporated herein by reference in its entirety.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]The invention relates to a method for measuring the thickness of an opaque layer that constitutes an opaque laminated body in which a plurality of the opaque layers are laminated.[0004]2. Description of Related Art[0005]Grasping of the thickness of a layer that constitutes a multilayer body in which a plurality of the layers are stacked has been required. In this regard, a method for measuring the thickness of an opaque layer (opaque film) that constitutes the multilayer body is disclosed in, for example, Japanese Patent Application Publication No. 2001-194117 (JP 2001-194117 A). Specifically, etching is performed on the opaque film and a concave portion that penetrates the opaque film in a thickness dire...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): G01B11/06
CPCG01B11/06G01B11/0633Y02P70/50
Inventor MIURA, MASANORI
Owner TOYOTA JIDOSHA KK
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