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Cold filament ignition system and method of silicon rods

Active Publication Date: 2017-09-26
ADVANCED MATERIAL SOLUTIONS LLC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0004]In an exemplary embodiment of the present invention for igniting one or more filaments for silicon production, an output voltage may be applied to the one or more filaments using a transformer connected in series with the one or more filaments. In addition, a current may be supplied to a primary winding of the transformer in combination with the application of the output voltage via a choke to limit the current to a first predetermined current threshold range. The combination of the supplied current and the applied output voltage allows a predetermined output range to be generated from a power supply device initially required to ignite the one or more filaments.

Problems solved by technology

However, as the silicon seed rods heat up, the resistance of the silicon seed rods rapidly changes and the current flow also rapidly changes which may have significant impact on the likelihood of achieving the deposition process as melting can occur when the current and ultimately seed rod temperature increases beyond a predetermined threshold.

Method used

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  • Cold filament ignition system and method of silicon rods
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  • Cold filament ignition system and method of silicon rods

Examples

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Embodiment Construction

[0034]The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms “a”, “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “comprises” and / or “comprising,” when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items. Unless specifically stated or obvious from context, as used herein, the term “about” is understood as within a range of normal tolerance in the art, for example within 2 standard deviations of the mean. “About” can be und...

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Abstract

A method and system of igniting one or more filaments for silicon production includes applying an output voltage to the one or more filaments using a transformer connected with the one or more filaments. In addition, the method includes supplying, in combination with the application of the output voltage, a current to a primary winding of the transformer via a choke to limit the current to a first predetermined current threshold range. The combination of the supplied current and applied output voltage allows a predetermined output range to be generated from a power supply device initially required to ignite the one or more filaments.

Description

RELATED APPLICATIONS[0001]This application claims the benefit of U.S. Provisional Application No. 61 / 862,710, filed Aug. 6, 2013. This application is herein incorporated by reference in its entirety for all purposes.FIELD OF THE INVENTION[0002]The present invention relates to ignition of silicon filaments and, in particular, to the production of silicon after igniting the silicon filaments.BACKGROUND OF THE INVENTION[0003]In semiconductor fabrication processes and photovoltaic applications utilizing processes such as chemical vapor deposition (CVD), materials are typically heated in reaction chambers that require high synchronous voltages to achieve reaction and / or deposition of various chemical agents. In particular, a typical CVD reaction process utilizes electrical energy to heat silicon seed rods (e.g., filaments) to a temperature at which silicon deposition. Electrical energy heats the silicon seed rods using resistive heating as a current is passed through the silicon seed rod...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): C01B33/021B01J19/08C01B33/035H05B1/02
CPCC01B33/021B01J19/087C01B33/035H05B1/0233B01J2219/0803B01J2219/0879
Inventor LIESE, MICHAEL HARROVOLLMAR, WILFRIEDWORNATH, CASEY MICHAEL
Owner ADVANCED MATERIAL SOLUTIONS LLC