Devices and methods of forming VFET with self-aligned replacement metal gates aligned to top spacer post top source drain EPI

Abstract

Devices and methods of fabricating vertical field effect transistors on semiconductor devices are provided. One intermediate semiconductor includes: a substrate, a bottom spacer layer above the substrate, a plurality of fins, wherein at least one fin is an n-fin and at least one fin is a p-fin; a high-k layer and a work function metal over the bottom spacer layer and around the plurality of fins; a top spacer above the high-k layer and the work function metal and surrounding a top area of the fins; a top source/drain structure over each fin; a dielectric capping layer over the top source/drain structure; a fill metal surrounding the work function metal; and a liner.

Description

FIELD OF THE INVENTION[0001]The present invention relates to semiconductor devices and methods of fabricating semiconductor devices, and more particularly, to devices and methods of forming vertical FETs with self-aligned metal gates aligned to a top spacer following top source drain epitaxial growth.BACKGROUND OF THE INVENTION[0002]For 5 nm and beyond nodes, with the continually increasing demand for smaller circuit structures and faster device performance, the need for increased current density has resulted in the development of vertical field effect transistors (VFETs). However, realization of VFETs with replacement metal gate (RMG) structures is complex, due to the placement of the gate structure below the source and drain structure, greatly increasing the complexity of these structures and limiting the thermal budgets of the resultant devices.[0003]Therefore, it is desirable to develop methods of fabricating VFET structures which enable the integration of replacement gate struc...

AI Technical Summary

Benefits of technology

[0004]The shortcomings of the prior art are overcome and additional advantages are provided through the provisions, in one aspect, a method that includes, for instance: obtaining an intermediate semiconductor device having a substrate, a bottom spacer layer above the substrate, a plurality of fins, wherein at least one fin is an n-fin and at least one fin is a p-fin, and a set of vertical hardmasks disposed over each fin; depositing a sacrificial dielectric layer and a thin sacrificial gate layer over the plurality of fins and the bottom spacer layer; depositing an interlayer dielectric material between the plurality of fins and planarizing a top sur...

Problems solved by technology

However, realization of VFETs with replacement metal gate (RMG) structures is complex, due to the placement of the gate structure below t...

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