The utility model relates to the technical field of
optical film attaching, and discloses a Pellicle automatic separating device clamping jaw which comprises an installation frame and a pushing
assembly fixed on the installation frame, the movable end of the pushing
assembly is fixedly connected with a clamping jaw frame, an
ultrasonic generator assembly is further installed on the installation frame, and the
ultrasonic generator assembly is fixedly connected with the clamping jaw frame. The
ultrasonic generator assembly is used for monitoring the change of the distance between the lower
film frame and the ultrasonic generator assembly. According to the utility model, the
ultrasonic sensor is additionally arranged on the clamping jaw frame, so that the height change (deformation change) of the
film frame during separation is measured in real time, the torque of the clamping jaw is adjusted in real time by matching with a PLC (
Programmable Logic Controller) program, and when the deformation is large, the torque of the clamping jaw during separation is automatically reduced; therefore, the
Pellicle membrane surface wrinkles caused by the fact that the membrane frame is always in a deformation state due to the fact that large torque separation is used all the time are avoided.