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Piezoelectric vibrator, production method therefor, and equipment provided with this piezoelectric vibrator

A piezoelectric vibration and manufacturing method technology, which is applied in the manufacturing/assembly of piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, and piezoelectric/electrostrictive devices. Changes in vibration characteristics, resonance frequency deviation, and amplitude ratio differences, etc., can reduce the deviation of vibration performance, suppress the deterioration of characteristics, and prevent residual stress.

Inactive Publication Date: 2008-09-10
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, as mentioned above, if the quality of the adhesive layer varies, the resonance frequencies of multiple vibration modes will vary, so that the amplitude ratio of each vibration mode of the piezoelectric actuator at the driving frequency will be different, resulting in a change in vibration characteristics.

Method used

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  • Piezoelectric vibrator, production method therefor, and equipment provided with this piezoelectric vibrator
  • Piezoelectric vibrator, production method therefor, and equipment provided with this piezoelectric vibrator
  • Piezoelectric vibrator, production method therefor, and equipment provided with this piezoelectric vibrator

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0043] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0044] FIG. 1 is an overall perspective view of a piezoelectric actuator 1 as a piezoelectric vibrating body according to the present embodiment. In FIG. 1 , a piezoelectric actuator 1 has: a flat base member 2; piezoelectric elements 3 attached to the front and back sides of the base member 2; and an adhesive layer for bonding the base member 2 and the piezoelectric element 3. 4.

[0045] The base member 2 is a thin plate-shaped member having a thickness of about 0.1 mm formed in a substantially rectangular shape. The material of the base member 2 can be made of stainless steel, phosphor bronze, or other arbitrary materials, and it is composed of SUS301 in this embodiment. Approximately semicircular protrusions 21 protruding in the longitudinal direction are integrally formed at both diagonal ends of the base member 2 .

[0046] The piezoelectric element 3 is atta...

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PUM

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Abstract

An adhesive layer (4) is formed between a piezoelectric element (3) and a baseboard (2) by using an adhesive agent with a Shore D hardness of 80 HS or greater to couple the baseboard (2) and the piezoelectric element (3). The adhesive layer (4) is formed in a uniform thickness by placing two spacers on a transfer sheet and spreading the adhesive agent between these spacers. The baseboard (2) and the piezoelectric element (3) bonded together by the adhesive layer (4) are heated in a pressed state to cause the adhesive layer (4) to harden. The vibration loss in the adhesive layer (4) can be reduced because the hardened adhesive layer (4) has high hardness. In addition, variation in the vibration characteristics of a piezoelectric actuator (1) can be reduced because the thickness of the adhesive layer (4) is uniform.

Description

technical field [0001] The present invention relates to a piezoelectric vibrating body having a base member and a piezoelectric element attached to the base member and vibrating the piezoelectric element near a resonance point of a plurality of vibration modes, a manufacturing method thereof, and a piezoelectric vibrator having the piezoelectric vibrator body machine. Background technique [0002] As a so-called piezoelectric vibrator that vibrates with the displacement of a piezoelectric element, there are products in which piezoelectric elements are pasted on both sides of a flat base member (reinforcing plate) to constitute a piezoelectric vibrator and operate as a piezoelectric actuator. (For example, JP-A-2000-333480). In this piezoelectric actuator, when an AC voltage is applied to the piezoelectric element, the piezoelectric actuator as a whole vibrates with the base member to drive the driven body. At this time, by setting the shape and size ratio in advance, vibra...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B06B1/06G10K9/122H01L41/09H01L41/18H01L41/187H01L41/22H01L41/313H02N2/08H02N2/16
CPCB06B1/0611H01L41/313B06B1/0688H01L41/0906H01L41/337H01L41/29B06B1/0648H01L41/22G10K9/122H02N2/004H02N2/103H10N30/2023H10N30/073H10N30/086
Inventor 泽田明宏赤羽秀弘长滨玲子
Owner SEIKO EPSON CORP