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A slit nozzle

A slit nozzle and bolt technology, applied in the field of slit nozzles, can solve the problems of uneven and different coating distribution, and achieve the effect of uniform coating distribution and reduced influence.

Active Publication Date: 2009-03-04
艾美柯技术株式会社
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, in the case of the slit nozzle with the above-mentioned structure, when the left and right halves are fastened with bolts, stress is directly transmitted from the bolts to the portion close to the bolts, that is, the periphery of the through hole for bolt insertion, so compared with other parts, The periphery of the through hole is tightened more firmly, so the width of the slit-shaped discharge port varies locally, causing uneven coating distribution.

Method used

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Experimental program
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Embodiment Construction

[0021] Embodiments of the present invention will be described below based on the drawings.

[0022] figure 1 It is a side sectional view showing one embodiment of the slit nozzle of the present invention, figure 2 yes figure 1 The view from the A—A direction of .

[0023] The slit nozzle of the present embodiment is composed of left and right halves 1 and 2 .

[0024] Through-holes 11, 12, 21, 22 are formed in the width direction, so that upper and lower sections are formed on the left and right halves 1, 2, respectively. These through holes 11, 12, 21, 22 are formed with a plurality of spaced intervals in the length direction in the upper and lower sections, and the axes of the corresponding through holes 11, 21, and the through holes 12 and 22 are consistent. In addition, common bolts 31 .

[0025] In addition, on the opposing surface (abutting surface) of the half body 1 and the half body 2, a recess 13 serving as a reservoir for the application liquid is formed, a...

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PUM

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Abstract

The present invention relates to a slit nozzle, the width of the discharge opening of which is uniform in length direction, capable of reducing the affect to coating distribution caused by the stress transferred from bolt directly. A end opening, for intruding the via holes(11, 12)of bolt(31), is formed on the grooves(16, 17)extending along length direction, rather than is made to directly contact with the opposite surface of the opposed half body(2), thus, the fastening force of bolt(31)will not focus on the opening circumference of the via holes(11, 12)but uniformly disperses in the length direction of the nozzle. As a result, the width of the slit discharge opening(14)becomes to be uniform.

Description

technical field [0001] The present invention relates to a nozzle, in particular to a slit nozzle for coating a photoresist liquid or a coating liquid for forming a color filter with a predetermined width on the surface of an object to be processed such as a glass substrate or a semiconductor wafer. Background technique [0002] As shown in Patent Document 1, a slit nozzle is generally constructed by joining left and right halves. Specifically, if Figure 5 As shown, through-holes 103 are formed in the width direction in the left and right half bodies 101 and 102 , and the slit nozzle is assembled by passing through the through-holes 103 and fastening bolts 104 . In this state, between the left and right halves 101 , 102 , a storage portion 105 for the application liquid and a slit-shaped discharge portion 106 are formed. [0003] In addition, Patent Document 2 and Patent Document 3 also disclose slit nozzles having the same configuration. Its structure also all is to assem...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05C5/02C03C17/00H01L21/02B05B1/02
CPCB05B1/005B05B1/044G03F7/16H01L21/6715
Inventor 高濑真治升芳明
Owner 艾美柯技术株式会社