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Method for fabricating organic thin film transistor in plastic base plate

A technology of organic thin film and manufacturing method, which is applied in semiconductor/solid-state device manufacturing, electrical solid-state devices, semiconductor devices, etc., and can solve problems affecting the electrical properties of organic thin-film transistors, high material costs, and the inability to improve the arrangement efficiency of organic semiconductor materials, etc.

Inactive Publication Date: 2009-03-11
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] 1. The existing manufacturing methods of organic thin film transistors require complex and time-consuming steps, and the required material costs are also high, which increases manufacturing costs and affects market competitiveness
[0006] 2. The existing method of manufacturing organic thin film transistors must use yellow light technology, which is easy to cause wear and tear on the substrate and corrosion of chemicals, which affects the yield of the process
[0007] 3. The existing methods of manufacturing organic thin film transistors use glass substrates as substrates, which cannot improve the arrangement of organic semiconductor materials, thus affecting the electrical properties of organic thin film transistors.

Method used

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  • Method for fabricating organic thin film transistor in plastic base plate
  • Method for fabricating organic thin film transistor in plastic base plate
  • Method for fabricating organic thin film transistor in plastic base plate

Examples

Experimental program
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Effect test

no. 1 Embodiment

[0043] Figure 1A to Figure 1G It is a schematic flowchart of the first specific embodiment of the manufacturing method of the plastic substrate organic thin film transistor of the present invention.

[0044] Such as Figure 1A As shown, a master mold 100 is provided, wherein the master mold 100 has a relief structure 1001, and the relief structure 1001 can be produced by German deep molding (LIGA) technology, because deep molding (LIGA) technology is suitable for mass production of high aspect ratio ( Aspect Ratio) and low surface roughness (Sub μm) straight sidewall microstructure, while the deep molding (LIGA) technology is to paste a layer of dry film or coat a layer of polymer material on the master mold 100 (Fig. not shown), where the thickness of the dry film or polymer material depends on the thickness of the workpiece or the depth of the microstructure, ranging from several 10 μm to several 100 μm. Generally, laser processing is used to adjust the light source project...

no. 2 Embodiment

[0050] Figure 2A to Figure 2G It is a schematic flow chart of the second specific embodiment of the manufacturing method of the plastic substrate organic thin film transistor of the present invention.

[0051] exist Figure 2A In the present invention, a master mold 200 is provided, wherein the master mold 200 has a relief structure 2001, and the relief structure 2001 can be produced by German deep molding (LIGA) technology.

[0052] Such as Figure 2B As shown, the plastic substrate 201 is extruded with the master mold 200 , and the relief structure 2001 can define the gate position of the plastic substrate 201 at this time. The plastic substrate 201 can use 3 or -NH 2 High polymer materials are used as substrate materials, such as plastic materials such as polymethyl methacrylate or cycloolefin copolymer. The plastic substrate 201 is produced by extrusion molding, which can omit the process of polishing and etching, so as to shorten the time required for the process. ...

no. 3 Embodiment

[0057] Figure 3A to Figure 3G It is a schematic flow chart of the third specific embodiment of the manufacturing method of the plastic substrate organic thin film transistor of the present invention.

[0058] exist Figure 3A In the present invention, a master mold 300 is provided, wherein the master mold 300 has a relief structure 3001, and the relief structure 3001 can be produced by German deep molding (LIGA) technology.

[0059] Such as Figure 3B As shown, the plastic substrate 301 is extruded with the master mold 300 , and the relief structure 3001 can define the gate position of the plastic substrate 301 at this time. And the plastic substrate 301 can use 3 or -NH 2 High polymer materials are used as substrate materials, such as plastic materials such as polymethyl methacrylate or cycloolefin copolymer. The plastic substrate 301 is made by extrusion molding, which can omit the process of polishing and etching, so as to shorten the time required for the process.

...

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Abstract

The method includes steps: providing a master-die and a plastic base plate, the master-die possesses a structure of relief printing plate; pressing out forming is carried out for the plastic base plate by the master-die so as to define position of source / drain poles on the plastic base plate; forming first pole layer, and forming source / drain poles on the position of source / drain poles; forming multiple semiconductor platforms, and each semiconductor platform covers a pair of source / drain poles; forming a second pole layer, which is above the semiconductor layer separated by the isolation layer; and forming a protection layer.

Description

technical field [0001] The invention provides a method for manufacturing an organic thin film transistor with a plastic substrate, especially a method for manufacturing an organic thin film transistor by defining the electrode positions of the plastic substrate by means of extrusion molding. Background technique [0002] In recent years, the widespread use of PCs and the popularization of the Internet have largely changed the traditional way of reading. However, due to people's reading habits, paper is still an important carrier for disseminating information. With the maturity of display technology, lighter, thinner, portable and flexible displays such as electronic paper have attracted the attention of many investors in the United States, and many large companies have also joined this "paper revolution". Organic thin-film transistors (OTFT) use organic molecular materials to develop thin-film transistors suitable for use in electronic products. When the panel is bent, the c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/40
Inventor 黄良莹何家充李正中
Owner IND TECH RES INST
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