Method for fabricating organic thin film transistor in plastic base plate
A technology of organic thin film and manufacturing method, which is applied in semiconductor/solid-state device manufacturing, electrical solid-state devices, semiconductor devices, etc., and can solve problems affecting the electrical properties of organic thin-film transistors, high material costs, and the inability to improve the arrangement efficiency of organic semiconductor materials, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
no. 1 Embodiment
[0043] Figure 1A to Figure 1G It is a schematic flowchart of the first specific embodiment of the manufacturing method of the plastic substrate organic thin film transistor of the present invention.
[0044] Such as Figure 1A As shown, a master mold 100 is provided, wherein the master mold 100 has a relief structure 1001, and the relief structure 1001 can be produced by German deep molding (LIGA) technology, because deep molding (LIGA) technology is suitable for mass production of high aspect ratio ( Aspect Ratio) and low surface roughness (Sub μm) straight sidewall microstructure, while the deep molding (LIGA) technology is to paste a layer of dry film or coat a layer of polymer material on the master mold 100 (Fig. not shown), where the thickness of the dry film or polymer material depends on the thickness of the workpiece or the depth of the microstructure, ranging from several 10 μm to several 100 μm. Generally, laser processing is used to adjust the light source project...
no. 2 Embodiment
[0050] Figure 2A to Figure 2G It is a schematic flow chart of the second specific embodiment of the manufacturing method of the plastic substrate organic thin film transistor of the present invention.
[0051] exist Figure 2A In the present invention, a master mold 200 is provided, wherein the master mold 200 has a relief structure 2001, and the relief structure 2001 can be produced by German deep molding (LIGA) technology.
[0052] Such as Figure 2B As shown, the plastic substrate 201 is extruded with the master mold 200 , and the relief structure 2001 can define the gate position of the plastic substrate 201 at this time. The plastic substrate 201 can use 3 or -NH 2 High polymer materials are used as substrate materials, such as plastic materials such as polymethyl methacrylate or cycloolefin copolymer. The plastic substrate 201 is produced by extrusion molding, which can omit the process of polishing and etching, so as to shorten the time required for the process. ...
no. 3 Embodiment
[0057] Figure 3A to Figure 3G It is a schematic flow chart of the third specific embodiment of the manufacturing method of the plastic substrate organic thin film transistor of the present invention.
[0058] exist Figure 3A In the present invention, a master mold 300 is provided, wherein the master mold 300 has a relief structure 3001, and the relief structure 3001 can be produced by German deep molding (LIGA) technology.
[0059] Such as Figure 3B As shown, the plastic substrate 301 is extruded with the master mold 300 , and the relief structure 3001 can define the gate position of the plastic substrate 301 at this time. And the plastic substrate 301 can use 3 or -NH 2 High polymer materials are used as substrate materials, such as plastic materials such as polymethyl methacrylate or cycloolefin copolymer. The plastic substrate 301 is made by extrusion molding, which can omit the process of polishing and etching, so as to shorten the time required for the process.
...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com