Vibration sensor
A vibration sensor and vibrating film technology, which is applied in the directions of sensor, vibration measurement, vibration measurement in fluid, etc., can solve the problems of vibrating film electrode damage, vibrating electrode damage, unfavorable sensitivity, etc., and achieve damage prevention, good assembly operations, and improved The effect of sensitivity
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Embodiment approach 1
[0056] Such as figure 1 As shown, the vibration sensor of Embodiment 1 is a vibration sensor that has a fixed electrode 1 and a vibrating membrane electrode 3, and can output the change in electrostatic capacitance between the fixed electrode 1 and the vibrating membrane electrode 3 as a vibration signal. The electrode 3 is provided with a thin cylindrical hammer body 2 on the membrane surface opposite to the side opposite to the fixed electrode 1 and is fixedly supported around it. On the end of the hammer body 2, the following The protruding portion 2a protrudes along the direction of the membrane surface while being spaced apart from the membrane surface of the vibrating membrane electrode 3, and a vibrating membrane ring 4 as a limiting member is provided adjacent to the end of the hammer body 2, and the vibrating membrane ring 4 is connected to the vibrating membrane ring 4 along the membrane surface. The protruding portion 2 a of the hammer body 2 displaced along the mem...
Embodiment approach 2
[0062] The difference between the vibration sensor of Embodiment 2 and Embodiment 1 is that it has such a structure that, in addition to restricting the displacement of the hammer body 2 along the membrane surface direction of the vibrating membrane electrode 3, it also restricts the displacement of the hammer body 2 in the direction of the vibration membrane electrode 3. Displacement in a direction perpendicular to the film surface direction of the electrode 3 .
[0063] That is, if image 3 As shown, a restricting ring 9 as the second restricting member KB is provided, and the restricting ring 9 abuts against the surface 2c of the hammer body 2 displaced in a direction perpendicular to the film surface direction of the vibrating membrane electrode 3, and can restrict the hammer body. 2 displacements. Here, the restriction ring 9 is provided in a state of being sandwiched between the above-mentioned vibrating membrane ring 4 and the above-mentioned electrode ring 7 , and an ...
Embodiment approach 3
[0068] The vibration sensor of the third embodiment differs from the first embodiment in that the movable portion of the vibrating membrane electrode 3 is formed in a shape to absorb shock.
[0069] That is, if Figure 7 As shown, the vibrating membrane electrode 3 has a corrugation 3a between the inner part where the weight 2 is attached and the outer part which is fixedly supported. In addition, the corrugated plate portion 3a is formed in a convex shape on the side opposite to the fixed electrode 1 (the lower side in the figure), and is received between the vibrating membrane electrode 3 and the above-mentioned protruding portion 2a so as not to interfere with the fixed electrode 1 during vibration. The electret layer 5 of the fixed electrode 1 touches. The impact applied to the vibrating membrane electrode 3 can be absorbed by the corrugated plate portion 3 a, and the movable performance of the vibrating membrane electrode 3 can be improved. Furthermore, without reducing...
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