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Vibration sensor

A vibration sensor and vibrating film technology, which is applied in the directions of sensor, vibration measurement, vibration measurement in fluid, etc., can solve the problems of vibrating film electrode damage, vibrating electrode damage, unfavorable sensitivity, etc., and achieve damage prevention, good assembly operations, and improved The effect of sensitivity

Inactive Publication Date: 2009-04-01
HOSIDEN CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, in the past, as mentioned above, since there are relatively large gaps between the end of the hammer body and the diaphragm ring, and between the hammer body and the circuit board, etc., when it is dropped, it is subjected to excessive force. Impact, when the hammer body moves in a large range, a large force is applied to the vibrating membrane electrode, which may damage it
Especially if the corner of the end of the hammer is pointed, when the hammer is pasted on the vibrating membrane electrode, the corner of the end of the hammer will contact the vibrating membrane electrode and easily damage it. , due to stress concentration, it is easy to cause damage to the diaphragm electrode
[0006] On the other hand, although by increasing the weight of the hammer body, the inertial force is increased, and the sensitivity of the sensor can be improved, but if, for example, only the diameter of the cylindrical hammer body is increased, although the weight increases, due to the external vibration of the vibrating membrane electrode. The width of the movable part is reduced, therefore, it is detrimental to the improvement of the sensitivity
In addition, if the height of the cylindrical weight is increased, the weight increases, but in this case, the moment due to the impact when it is dropped or the like also increases, so the vibrating electrode is likely to be damaged.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0056] Such as figure 1 As shown, the vibration sensor of Embodiment 1 is a vibration sensor that has a fixed electrode 1 and a vibrating membrane electrode 3, and can output the change in electrostatic capacitance between the fixed electrode 1 and the vibrating membrane electrode 3 as a vibration signal. The electrode 3 is provided with a thin cylindrical hammer body 2 on the membrane surface opposite to the side opposite to the fixed electrode 1 and is fixedly supported around it. On the end of the hammer body 2, the following The protruding portion 2a protrudes along the direction of the membrane surface while being spaced apart from the membrane surface of the vibrating membrane electrode 3, and a vibrating membrane ring 4 as a limiting member is provided adjacent to the end of the hammer body 2, and the vibrating membrane ring 4 is connected to the vibrating membrane ring 4 along the membrane surface. The protruding portion 2 a of the hammer body 2 displaced along the mem...

Embodiment approach 2

[0062] The difference between the vibration sensor of Embodiment 2 and Embodiment 1 is that it has such a structure that, in addition to restricting the displacement of the hammer body 2 along the membrane surface direction of the vibrating membrane electrode 3, it also restricts the displacement of the hammer body 2 in the direction of the vibration membrane electrode 3. Displacement in a direction perpendicular to the film surface direction of the electrode 3 .

[0063] That is, if image 3 As shown, a restricting ring 9 as the second restricting member KB is provided, and the restricting ring 9 abuts against the surface 2c of the hammer body 2 displaced in a direction perpendicular to the film surface direction of the vibrating membrane electrode 3, and can restrict the hammer body. 2 displacements. Here, the restriction ring 9 is provided in a state of being sandwiched between the above-mentioned vibrating membrane ring 4 and the above-mentioned electrode ring 7 , and an ...

Embodiment approach 3

[0068] The vibration sensor of the third embodiment differs from the first embodiment in that the movable portion of the vibrating membrane electrode 3 is formed in a shape to absorb shock.

[0069] That is, if Figure 7 As shown, the vibrating membrane electrode 3 has a corrugation 3a between the inner part where the weight 2 is attached and the outer part which is fixedly supported. In addition, the corrugated plate portion 3a is formed in a convex shape on the side opposite to the fixed electrode 1 (the lower side in the figure), and is received between the vibrating membrane electrode 3 and the above-mentioned protruding portion 2a so as not to interfere with the fixed electrode 1 during vibration. The electret layer 5 of the fixed electrode 1 touches. The impact applied to the vibrating membrane electrode 3 can be absorbed by the corrugated plate portion 3 a, and the movable performance of the vibrating membrane electrode 3 can be improved. Furthermore, without reducing...

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PUM

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Abstract

A vibration sensor in which a vibration film electrode can be protected against breakage while deterioration of sensitivity being avoided and assembling work can be improved. The vibration sensor comprises a fixed electrode (1) and a vibration film electrode (3) provided with a weight (2) to the film surface on the side opposite the side facing the fixed electrode (1) and supported fixedly on the periphery, and can output as an vibration signal a variation in capacitance between the fixed electrode (1) and the vibration film electrode (3). A protrusion (2a) protruding along the film surface direction while being spaced apart from the film surface of the vibration film electrode (3) is formed partially at the end part of the weight (2), and a member (4) capable of regulating displacement of the weight (2) by being contact with the protrusion (2a) of the weight (2) displacing along the film surface direction of the vibration film electrode (3) is provided.

Description

technical field [0001] The present invention relates to a vibration sensor having a fixed electrode and a vibrating membrane electrode capable of outputting a change in electrostatic capacitance between the fixed electrode and the vibrating membrane electrode as a vibration signal. A hammer body is attached to the membrane surface on the opposite side of the set side, and the surrounding is fixedly supported. Background technique [0002] The above-mentioned vibration sensor is an electret condenser microphone type (ECM type) vibration sensor that can be used for, for example, a pedometer. In the past, in order to detect low-frequency vibrations such as swings during walking, a thin cylindrical weight such as a hammer is attached to the vibration sensor. On the membrane electrode, and in order to make the action of the hammer body good and make the sensitivity good, between the end of the plate-shaped hammer body and the diaphragm ring that fixes the surrounding of the vibra...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01H11/08G01H3/00G01H11/06H04R11/00H04R19/01H04R19/04
CPCH04R11/00G01H3/00G01H11/06
Inventor 安田护杉森康雄大辻贵久
Owner HOSIDEN CORP