Magnetic field controllable dimagnetic stable suspersion rotor micro gyroscope

Abstract

A micro-gyroscope with controllable magnetic field and stable suspended rotor in the field of micro-electromechanical technology. An electrode layer, two insulating support layers, a dielectric material layer, and a ring coil layer are arranged on the upper stator, and the two insulating support layers are arranged on the dielectric material. The upper and lower surfaces of the layers, the electrode layer is set on the outer surface of an insulating support layer, the ring coil layer is set on the outer surface of another insulating material layer, the common electrode is set in the center of the electrode layer, and the fan-shaped detection and square electrodes are set in turn from the inside to the outside. Rotating electrodes; the structure of the lower stator is the same as that of the upper stator, and an electrode layer, two layers of insulating support layers, a dielectric material layer, and a ring coil layer are also provided; the rotor is a rotor with external teeth or a rotor with internal teeth. The invention solves the above-mentioned problems in the background technology, and integrates the characteristics of high precision of the large suspended rotor gyroscope and low cost of the MEMS micro gyroscope, and can be mass-produced.

Description

technical field [0001] The invention relates to a device in the field of micro-electromechanical technology, in particular to a micro-gyroscope with a magnetic field-controllable medium-magnetic stable levitation rotor. Background technique [0002] Micro-mechanical gyroscopes are the product of the combination of MEMS (micro-electromechanical systems) technology and gyroscope technology, and there are two types: vibration type and suspended rotor type. The vibrating micro-gyroscope works using the Coriolis effect, and the size is within a few millimeters. The detection quality of the vibrating micro-gyroscope is connected to the substrate through a mechanical structure. Due to its own limitations and some difficulties in micro-processing, the drift accuracy is at a low-to-medium level. . The suspended rotor micro-gyroscope uses electromagnetic force or electrostatic force to separate the detection micro-rotor from the substrate, and its drift accuracy can reach the inertia...

AI Technical Summary

Problems solved by technology

[0004] Although the suspension rotor design scheme of Joe Nhut Ho of the University of Washington in the United States can realize the suspension and rotation of the rotor, there are several shortcomings and shortcomings in order to become a gyroscope, especially a micro-gyroscope using micro-processing technology: 1) The design scheme has no sensor , essentially cannot constitute a gyro sensor

2) Suspension and rotation both use electromagnetic fields, so suspension and rotation interfere with each other, and the stability of suspension and rotation becomes poor. It has a principle defect to become a gyroscope

3) The rotor adopts an equilateral triangle structure, and permanent magnets are arranged at the three vertices of the triangle. This structure is very unfavorable for the realization of gyro drive, detection, and torque addition functions

4) The design includes a spatially complex arrangement of drive coils, which is not convenient for micromachining, and is limited in mass production and cost reduction

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