Suspension type diamagnetic sensitive mass micro accelerometer

An accelerometer and magnetic sensitivity technology, applied in the direction of measurement of acceleration, speed/acceleration/shock measurement, measurement device, etc., can solve the problems of complex process and achieve the effect of simple process

Inactive Publication Date: 2009-07-08
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Its disadvantage is that it needs to provide suspension electrodes and radial control electrodes, and the process is relatively complicated

Method used

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  • Suspension type diamagnetic sensitive mass micro accelerometer
  • Suspension type diamagnetic sensitive mass micro accelerometer
  • Suspension type diamagnetic sensitive mass micro accelerometer

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Embodiment Construction

[0018] The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: this embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following the described embodiment.

[0019] Such as figure 1 , the present embodiment adopts a three-layer structure, which is composed of an upper stator 120 , a rotor 122 and a lower stator 121 . The upper stator 120 and the lower stator 121 are electrically and mechanically connected by bonding, and form a cavity, and the rotor 122 is placed in the cavity.

[0020] Such as figure 2 , the upper stator 120 includes: No. 1 electrical conduction groove 1, No. 2 electrical conduction groove 2, No. 3 electrical conduction groove 3, No. 4 electrical conduction groove 4, No. 5 electrical conduction groove ...

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Abstract

Disclosed is a micro-accelerometer with suspended anti-magnetic sensitive mass in the field of micro-electromechanical technology. The present invention consists of an upper stator, a rotor and a lower stator, and detects the linear acceleration in the Z-axis direction and the X-axis and Y-axis The angular acceleration of the capacitor plate is magnetized, and the rotor substrate is made of diamagnetic material, which provides an electrostatic levitation control unit that eliminates the need to provide floating electrostatic electrodes, coils or capacitor plates compared with the traditional electrostatic levitation. The invention is a new floating antimagnetic sensitive mass micro accelerometer which adopts the combination of permanent magnetic material and antimagnetic material to realize self-sustained suspension. It can simultaneously detect the acceleration of multiple degrees of freedom including linear acceleration along the X, Y, and Z axes and angular acceleration around the X, and Y axes, and then can be used to accurately position objects for detection of acceleration signals or navigation.

Description

technical field [0001] The invention relates to a micro-accelerometer in the field of micro-electromechanical technology, in particular to a suspension-type diamagnetic-sensitive mass micro-accelerometer. Background technique [0002] With the development of MEMS technology, inertial sensor devices have become one of the most successful and widely used MEMS devices in the past few years. hotspot. Among them, compared with the non-suspended micro accelerometer, the suspended micro accelerometer can theoretically obtain extremely high resolution because it eliminates the influence of the thermal noise caused by the manufacturing process and the mechanical connection support on the support stiffness. Accelerometers combined with gyroscopes (used to measure angular velocity) can precisely position objects for navigation. The most successful application is in the automotive industry. The anti-collision airbag of a car is a typical example of using accelerometers to control. [...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/00
Inventor 张卫平张忠榕陈文元刘武
Owner SHANGHAI JIAO TONG UNIV
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