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Industrial process evaluation device and industrial process evaluation method

A technology for manufacturing devices and evaluation devices, applied in program control, computer control, comprehensive factory control, etc., can solve problems such as labor-intensive and difficult to handle exceptions, and achieve the effect of proper handling

Inactive Publication Date: 2009-09-02
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in the prior art, there is a problem that it is difficult to properly handle abnormalities that occur in semiconductor manufacturing equipment
This kind of analysis work requires a lot of labor, and it is necessary to cooperate with the seller of the semiconductor device
[0006] In addition, when an abnormality occurs in a semiconductor manufacturing device, the user of the semiconductor manufacturing device needs to seek to prevent the recurrence of the abnormality, but for this, it is necessary to spend a lot of time on the basis of past experience and information from the seller of the semiconductor manufacturing device. a lot of labor to cope with

Method used

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  • Industrial process evaluation device and industrial process evaluation method
  • Industrial process evaluation device and industrial process evaluation method
  • Industrial process evaluation device and industrial process evaluation method

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Embodiment Construction

[0035] Next, a technique for evaluating the influence of an abnormality occurring in an industrial device on an object to be processed by the industrial device and outputting an evaluation result will be described.

[0036] Here, the term "industrial equipment" refers to equipment used in business, in particular, manufacturing equipment used in the manufacture of products as described below.

[0037] 1 Structure of manufacturing process management system

[0038] figure 1 It is a figure which shows the whole basic structure of the manufacturing process evaluation system PS which concerns on preferable embodiment of this invention.

[0039] Such as figure 1 As shown, the manufacturing process evaluation system PS includes: a manufacturing device 1 that executes the manufacturing process; a manufacturing process evaluation management device 3 that manages a manufacturing process evaluation database 9 that stores information related to the evaluation of the manufacturing proces...

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Abstract

An alarm detection part 103 monitors each element of a manufacturing device 1 , and detects an abnormality generated in the execution of a manufacturing process. In a process evaluation part 105 , an alarm severity judgment part 1051 judges an influence ("alarm severity") exerted by this abnormality upon an object such as a product, a semi-finished product or a product in process. Further, an alarm recurrence prevention advice judgment part 1053 makes judgment about advice on the recurrence prevention of an abnormality ("alarm recurrence prevention advice"). A detailed screen SC 3 showing executed process results presented on an output device 57 contains the alarm severity and the alarm recurrence prevention advice.

Description

technical field [0001] The present invention relates to an industrial process evaluation device and an industrial process evaluation method for evaluating an industrial process executed by an industrial device. Background technique [0002] Conventionally, an operator has been notified by displaying information on an abnormality occurring in a semiconductor manufacturing apparatus on a display or the like. For example, Patent Document 1 discloses a technique of displaying the cause and processing method of an abnormality occurring in a semiconductor manufacturing apparatus. [0003] Patent Document 1: JP Unexamined Publication No. 10-21079 [0004] However, in the prior art, there is a problem that it is difficult to properly handle abnormalities that occur in semiconductor manufacturing equipment. [0005] That is, when an abnormality occurs in a semiconductor manufacturing apparatus, the user of the semiconductor manufacturing apparatus must determine the manufacturing p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/048G05B23/02G06Q50/00G06Q50/04
CPCG05B19/4184G05B2219/45031G05B2219/31437Y02P90/02G06Q10/06
Inventor 中村康则
Owner DAINIPPON SCREEN MTG CO LTD
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