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Direction change device

A technology of direction conversion and conveying direction, which is applied in conveyor control device, transportation and packaging, turntable/car transfer platform, etc., which can solve the problems of inability to change direction, wasting time, and lengthening handling time.

Inactive Publication Date: 2007-08-22
ASYST SHINKO INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, when the direction of the article is changed as shown in Patent Document 1, if the guide rail is not rotated again to return to its original position after the direction change is completed, it is impossible to control the direction of the article that is subsequently transferred to the conveying rail. Item undergoes orientation transformation
Therefore, every time the direction is changed, it is necessary to return the guider drive rail to the original position, and there is a problem that time is wasted and the transport time becomes longer because the article cannot be transported in the meantime.

Method used

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Embodiment Construction

[0019] Next, preferred embodiments of the present invention will be described with reference to the drawings. The direction changing device in the present embodiment is particularly suitable for use in a transport system, such as a semiconductor product manufacturing facility, in which an object to be processed is transported by a transport rail within a process or between processes to form a final product. In addition, in the following description, although semiconductors are treated as objects to be processed, the conveyance system for conveying semiconductor substrates, glass substrates for liquid crystal display devices, glass substrates for photomasks, and substrates for optical discs is described. , but not limited to this, it can also be applied to various handling systems in all industries that carry electronic components, mechanical components, chemicals, food, books and other goods.

[0020] In addition, the term "semiconductor" refers to, for example, a plurality of...

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PUM

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Abstract

The present invention provides a direction change device which can reduce the transport time, including first and second transport passage 3, 4, in which one of the transport passages is disposed at the same vertical position as that of the first transport rail 16, the other is disposed below the one, a rotating unit 22 rotating the transport passages 3, 4 about their central points, a lift unit 23 lifting the transport passages 3, 4 in a vertical direction and a control unit 21. The control unit 21 controls such that when the FOUP 5 is carried out from the transport rail 16 to the transport passage disposed at the same vertical position as that of the transport rail 16, rotating the transport passages 3, 4 by about 90 DEG, carrying out the FOUP 5 from one of the transport passages, and exchanging the respective vertical positions of the first and second transport passages 3, 4.

Description

technical field [0001] The present invention relates to a direction changing device for changing the conveying direction of conveyed articles. Background technique [0002] As a conveying unit in processes such as semiconductor manufacturing, liquid crystal manufacturing, and FA (Factory Automation), there is a conveying device described in Patent Document 1, for example. In the conveyance device of Patent Document 1, rotatable rollers protrude from the upper surfaces of a pair of guide rails, and an article placed on the rollers is transferred along the guide rails by rotation of the rollers. Furthermore, in Patent Document 1, a guide driving rail for switching the direction of articles is provided on the rails arranged at right angles. The guide drive rail is rotatably provided between two guide rails arranged at right angles, and the direction of the article can be changed by rotating while the article is placed. [0003] Patent Document 1: Special Publication No. 2003-...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G47/52B65G47/54B65G47/68B65G37/00B65G43/00B65G43/08B65G13/00B65G49/05G02F1/1333H01L21/677
CPCB61J1/00H01L21/67715H01L21/6773B65G43/08
Inventor 久德千三椿达雄村田正直
Owner ASYST SHINKO INC
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