Method for preparing micron/submicron metal ring and open-mouth metal ring
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- NANJING UNIV
- Publication Date
- 2007-11-14
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to a preparation method of a two-dimensional ordered micron / submicron metal ring and an artificial magnetic metamaterial formed by a two-dimensional ordered array of the micron / submicron open metal ring. Background technique
[0002] The preparation technology of two-dimensional ordered micro / submicron metal rings and split metal rings is a technology with important application background. Due to the tunable plasmon resonance of micron / submicron metal rings, the magnetic response of micron / submicron split metal rings and other novel electromagnetic properties, micron / submicron metal rings and split rings are widely used in optical devices, high-density storage, negative Areas such as refractive materials have potential applications. At present, the methods for preparing micron / submicron metal rings and split rings mainly include photolithography, electron beam or ion beam etching, focused ion beam direct writing, microcontact pri...