Sample supporter for scanning electronic microscope

A technology for electron microscopes and sample holders, which is applied in the direction of circuits, discharge tubes, electrical components, etc., can solve problems such as parts falling in, not easy to find, and hidden dangers in the safe operation of scanning electron microscopes, so as to improve the adjustment accuracy and service life.

Inactive Publication Date: 2008-02-20
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The sample holder of existing scanning electron microscope (S-4700 and S-4800), as shown in Figure 1, it comprises sample stage 1, screw rod 2 and base 3, is placed with sample 5 on sample stage 1, this sample holder It is easy to unscrew the screw 2 out of the base 3 when adjusting the height, as shown in Figure 2, it may not be easy to find when it is placed in the scanning electron microscope room, but it will be stuck on the platform 4 when it is taken out of the scanning electron microscope room
And when the height adjustment range of the sample holder is relatively large, the existing holder needs

Method used

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  • Sample supporter for scanning electronic microscope
  • Sample supporter for scanning electronic microscope
  • Sample supporter for scanning electronic microscope

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Embodiment Construction

[0017] As shown in Fig. 3, it is a schematic diagram of the structure of the sample holder of the present invention. It includes a sample stage 1 , a screw mechanism 20 and a base 3 with a threaded hole in the middle, a sample 5 is placed on the sample stage 1 , and a screw 27 of the screw mechanism 20 is screwed into the base 3 .

[0018] The specific structure of the screw mechanism 20 of the present invention can be as shown in Figures 5-7. As shown in FIG. 5 , the screw mechanism 20 consists of a replaceable module 21 and a lower part 22 . As shown in FIG. 6 , the replaceable module 21 is composed of a screw part 23 , a body 24 and a threaded hole 25 . As shown in FIG. 7 , the lower part 22 consists of a screw rod 27 , a stopper 28 and a connecting screw rod 26 . Wherein the connecting screw 25 and the threaded hole 25 are threaded screw mechanisms for realizing the connection between the replaceable module 21 and the lower part 22 . Of course, other forms of threaded s...

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PUM

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Abstract

The utility model discloses a sample support for scanning electronic microscope, to prevent the sample support screw from turning out of the base and jamming on the platform. The sample support comprises a sample platform and a base with a plurality of threaded hole in the middle, and a screw mechanism; wherein, the screw used for adjusting height is arranged at the lower part of the screw mechanism. The screw is connected with the threaded hole; the lower part of the screw mechanism can screw into the base without exceeding the base thickness; the sample platform is connected with the top of the screw mechanism. The screw mechanism consists of two parts, the lower part is provided with the screw, and the top is provided with a replaceable module which is connected with the lower part of the screw mechanism and the sample platform respectively via a fast release device; the fast release device is of threaded screw structure; and the height of each replaceable module is determined according to the real need.

Description

technical field [0001] The invention relates to a sample holder for a scanning electron microscope. Background technique [0002] The sample holder of existing scanning electron microscope (S-4700 and S-4800), as shown in Figure 1, it comprises sample stage 1, screw rod 2 and base 3, is placed with sample 5 on sample stage 1, this sample holder It is easy to screw the screw 2 out of the base 3 when adjusting the height, as shown in Figure 2, it may not be easy to find when it is put into the scanning electron microscope room, but it will be stuck on the platform 4 when it is taken out from the scanning electron microscope room. And when the height adjustment range of the sample holder is relatively large, the existing holder needs to replace the screw rods of different lengths. Frequent replacement may easily cause tooth scratches between the screw holes of the base and the screw rods, which will bring hidden dangers to the safe operation of the scanning electron microscope....

Claims

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Application Information

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IPC IPC(8): H01J37/20
Inventor 苏凤莲葛挺锋章鸣王俊杰
Owner SEMICON MFG INT (SHANGHAI) CORP
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