Vibration sensor
A vibration sensor and vibrator technology, applied in instruments, steering sensing equipment, gyroscope/steering sensing equipment, etc., can solve the problem of difficulty in improving the sensitivity of the installation method.
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[0027] A first embodiment of the present invention is an angular velocity sensor in which two tuning-fork vibrators are mounted on a housing. FIG. 1 is a perspective view of an angular velocity sensor according to the first embodiment, and FIG. 2 is a perspective view of a tuning fork vibrator 10 . Referring to FIG. 1, the angular velocity sensor of the present embodiment has two tuning fork vibrators 10a and 10b, each corresponding to the tuning fork vibrator 10 shown in FIG. The vibrators 10a and 10b are respectively mounted and fixed on the mounting portions 20a and 20b of the cavity-type housing 30 . Pads 22a and 22b are provided on the mounting portions 20a and 20b, respectively. The electrodes of the vibrators 10a and 10b and the bonding wires for making electrical connection between these electrodes and the pads 22a and 22b are omitted in FIG. 1 . The vibrators 10a and 10b are arranged to form a right angle, and have sensing axes 1 and 2 running in respective axial di...
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