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Vibration sensor

A vibration sensor and vibrator technology, applied in instruments, steering sensing equipment, gyroscope/steering sensing equipment, etc., can solve the problem of difficulty in improving the sensitivity of the installation method.

Inactive Publication Date: 2008-03-05
FUJITSU MEDIA DEVICES +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the inventor found that the mounting method disclosed in Document 1 has difficulty in improving sensitivity

Method used

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no. 1 approach

[0027] A first embodiment of the present invention is an angular velocity sensor in which two tuning-fork vibrators are mounted on a housing. FIG. 1 is a perspective view of an angular velocity sensor according to the first embodiment, and FIG. 2 is a perspective view of a tuning fork vibrator 10 . Referring to FIG. 1, the angular velocity sensor of the present embodiment has two tuning fork vibrators 10a and 10b, each corresponding to the tuning fork vibrator 10 shown in FIG. The vibrators 10a and 10b are respectively mounted and fixed on the mounting portions 20a and 20b of the cavity-type housing 30 . Pads 22a and 22b are provided on the mounting portions 20a and 20b, respectively. The electrodes of the vibrators 10a and 10b and the bonding wires for making electrical connection between these electrodes and the pads 22a and 22b are omitted in FIG. 1 . The vibrators 10a and 10b are arranged to form a right angle, and have sensing axes 1 and 2 running in respective axial di...

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Abstract

A vibration sensor includes a tuning-fork vibrator having a base and arms extending from the base, a mounting portion for,mounting the tuning-fork vibrator, and multiple supporting members that mount the tuning-fork vibrator on the mounting portion.

Description

technical field [0001] The present invention relates to a vibration sensor, more particularly to a vibration sensor with a tuning fork vibrator. Background technique [0002] A vibration sensor such as an acceleration sensor with a tuning fork vibrator and an angular velocity sensor senses the vibration of the vibrator, thereby detecting the acceleration and the angular velocity. For example, angular velocity sensors are used in car navigation systems and image stabilization in digital cameras. Japanese Patent Application Publication No. 2005-49306 (Document 1) discloses a support in which a tuning-fork vibrator made of crystalline quartz is mounted on a mount such as a substrate or a package. The support may be a bump. [0003] The way in which the tuning fork vibrator is mounted on the mounting element is a key point to improve the sensitivity of the vibration sensor. Document 1 discloses a method of mounting a tuning-fork vibrator on a mounting member by using conducti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56G01P9/04G01C19/5621G01C19/5628G01P15/08H01L41/08H01L41/187
CPCG01C19/5607G01H11/00
Inventor 山地隆行石川宽胜木隆史高桥勇治中泽文彦
Owner FUJITSU MEDIA DEVICES
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