Integrated circuit tester

A technology for detection devices and integrated circuits, which is applied in the field of detection devices and detection devices for integrated circuits, can solve problems such as inability to fine-tune, low scanning resolution, and limited range of one-time detection, so as to achieve good implementation effects and improve scanning resolution. rate effect
CN101165476BInactive Publication Date: 2011-07-13苏州均华精密机械有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
苏州均华精密机械有限公司
Publication Date
2011-07-13
Estimated Expiration
Not applicable · inactive patent

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Abstract

On a baseboard, a sliding platform and a positioning device are set up; a vision detection device is mounted on the sliding platform via a connecting piece; said positioning device comprises a clamp assembly whose central width can be adjusted and whose height can raise up or fall down; the vision detection device, sliding platform and positioning device are respectively driven by a driven source; the driven source drive the movable detection head in the vision detection device and the clamp assembly to move.
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Description

technical field

[0001] The invention relates to a detection device, especially a detection device for integrated circuits, especially a detection device for the printing quality of integrated circuits after laser marking and surface defects of integrated circuits, and belongs to the technical field of integrated circuit manufacturing. Background technique

[0002] In the process of integrated circuit manufacturing, laser marking is usually used, and an inspection system is required to confirm the quality of laser marking and detect surface defects of the original integrated circuit. Visual inspection is a commonly used method in the market at present, and the detection head is fixed, so the scope of one-time inspection is limited. That is to say, if all integrated circuit products are to be inspected, they must be divided into multiple sections, which affects the output speed of laser typewriters; and the scanning resolution is not high, and fine-tuning cannot be realized ac...

Claims

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