Gyroscopes

A technology of gyroscope and mass block, applied in the field of gyroscope, can solve the problems of difficult multi-layering, small Coriolis force, etc., and achieve the effects of small size, light weight, simple manufacturing method and cheap manufacturing.

Inactive Publication Date: 2008-05-14
JAPAN AEROSPACE EXPLORATION AGENCY
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  • Abstract
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  • Application Information

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Problems solved by technology

[0028] However, the vibrating body of this gyroscope is one, and the Coriolis force generated is small
In addition, since the top is made of a single silicon substrate, it is difficult to multilayer

Method used

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Embodiment Construction

[0081] FIG. 2 is a schematic diagram for explaining the Coriolis force of a gyroscope having two detection masses. The support spring 4 is represented by one line. (a) shows an initial state, and (b) shows a state in which the detection masses 5 a and 5 b are vibrated at the same phase and rotated at an angular velocity Ω. According to formula (6), when the mass of the detection mass 5 becomes smaller, the resonance frequency becomes larger. Therefore, when the detection mass 5 is divided into two masses 5a, 5b, the resonance frequency becomes higher. And, by vibrating the respective detection masses 5a, 5b in the same phase, the respective detection masses 5a, 5b generate a Coriolis force F in the same direction. cori . If these Coriolis forces can be combined, a Coriolis force greater than the Coriolis force generated by driving one detection mass 5 can be obtained.

[0082] FIG. 3 is also a schematic diagram for explaining the Coriolis force when there are two detection...

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Abstract

A small and high performance gyroscope and its manufacturing method. The gyroscope (10) comprises an outer frame (11), an inner frame (12) arranged in the outer frame (11) while being supported movably in one direction, a plurality of detection masses (15) arranged in the inner frame while being supported movably in the direction perpendicular to the one direction, a plurality of outer supporting springs (13) for coupling the outer and inner frames, a plurality of inner supporting springs (14) for coupling the inner frame with the detection masses, actuators (16) for accelerating respective detection masses, and a detector (17) for detecting displacement of the inner frame. The actuators oscillate the plurality of detection masses in the same phase and Coriolis forces being generated through oscillation of respective detection masses are summed in the inner frame.

Description

technical field [0001] The invention relates to a gyroscope, in particular to a small and high-performance gyroscope and a manufacturing method thereof. Background technique [0002] In recent years, gyroscopes used in space machines operating in outer space have been required to be compact and have high performance. [0003] In addition, small gyroscopes are also required in navigation systems such as automobiles, game machines, imaging devices (cameras, video cameras), and the like. [0004] The Coriolis force used in the gyroscope increases as the mass and velocity of the detection mass increase. When the detection mass is miniaturized in order to miniaturize the gyroscope, its mass becomes smaller. In order to obtain a large Coriolis force with a small mass, it is necessary to increase the speed of the detection mass. However, there is a limit to the speed of the detection mass. [0005] For this reason, conventional gyroscopes have a problem that their sensitivity a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56G01P9/04H01L29/84
CPCG01C19/574Y10T74/1282
Inventor 三田信斋藤宏文年吉洋
Owner JAPAN AEROSPACE EXPLORATION AGENCY
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