Controllable electromagnetic wave transmittance structure based on sub-wave length metal double gratings and its preparation method
An electromagnetic wave and sub-wavelength technology, applied in the field of adjustable electromagnetic wave transmission structure, to achieve the effect of easy preparation, simple structure and easy acquisition
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[0026] The present invention can be realized through the following technical measures.
[0027] The materials involved in the present invention are metals with low loss, generally silver, aluminum or gold can be used.
[0028] For the microwave band and the mid-infrared band, due to the long wavelength, the structural parameters can take larger values, and the preparation accuracy is not high. Metal etching or other processes can be used to fabricate one-dimensional periodic gratings. Then arrange the two gratings in parallel, and adjust the spacing and lateral offset between adjacent gratings through the micro-manipulation system.
[0029]For the near-infrared and visible light wave bands, due to the short wavelength, the required structural parameters are small, and the precision requirements are high, a single-layer metal film can be fabricated by magnetron sputtering and other processes, and then a single-layer metal film can be fabricated by focused ion beam etching (FIB)...
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