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CCD output node with single-hold structure

An output node, hole structure technology, applied in electrical components, electrical solid devices, circuits, etc., can solve problems such as increasing capacitance, reducing CCD charge packet conversion sensitivity, and occupancy.

Inactive Publication Date: 2008-08-06
THE 44TH INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The traditional structure is to open a contact hole at the output diode of the CCD, open a contact hole on the gate of the MOS transistor of the source follower amplifier, and connect the two contact holes with metal. Since there is a certain distance between the two contact holes, And the two contact holes also occupy a certain area, which increases the capacitance of this node and reduces the conversion sensitivity of the CCD charge packet. The unit of conversion sensitivity is: microvolts / electrons

Method used

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  • CCD output node with single-hold structure
  • CCD output node with single-hold structure
  • CCD output node with single-hold structure

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Embodiment

[0032] Referring to accompanying drawing 2, the contact hole connection structure diagram of CCD output diode and MOS tube grid of the present invention, a kind of CCD output node of single hole structure, it comprises: MOS tube grid 1, MOS tube grid contact hole 1-1, CCD The output diode 2, the CCD output diode contact hole 2-1, the reset drain 3 and the reset gate 4 are special in that: the MOS tube grid 1 and the CCD output diode 2 overlap, so that the MOS tube grid contact hole 1- The distance between 1 and the CCD output diode contact hole 2-1 is zero; a metal is formed on the two contact holes, and the metal connects the MOS transistor grid contact hole 1-1 and the CCD output diode contact hole 2-1.

[0033] Referring to accompanying drawing 3, the contact hole position relation figure of CCD output diode and MOS tube grid of the present invention, as can be seen from the figure, MOS tube grid 1 and CCD output diode 2 overlap, and MOS tube grid 1 is pressed on CCD output ...

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Abstract

The invention discloses a CCD output node with a single-hole structure comprising an MOS tube grid, an MOS tube grid contact hole, a CCD output diode, a CCD output diode contact hole, a restoration filler and a restoration grid. The single-hole structure of the CCD output node is characterized in that: the MOS tube grid is overlapped with the CCD output diode to make the MOS tube grid contact hole be close combined with the CCD output diode contact hole, and a metal is arranged on the two contact holes, which communicates the MOS tube grid contact hole with the CCD output diode contact hole; the single-hole structure takes the two contact holes as a whole to be a new contact hole, resolves the problem of generating corresponding capacitance because of a certain distance existing between the two contact holes. The CCD output node with a single-hole structure has the advantages that: the output amplitude of the CCD is improved 15 percent than the general structure under the same condition, and an object can be imaged in weaker illumination.

Description

technical field [0001] The invention relates to a charge coupled device, in particular to a CCD output node with a single hole structure. Background technique [0002] The signal charge packet of the charge-coupled device (CCD) needs to be amplified before being output off-chip, and the commonly used amplifier is a source-follower amplifier. The traditional structure is to open a contact hole at the output diode of the CCD, open a contact hole on the gate of the MOS transistor of the source follower amplifier, and connect the two contact holes with metal. Since there is a certain distance between the two contact holes, Moreover, the two contact holes also occupy a certain area, which increases the capacitance of this node and reduces the conversion sensitivity of the CCD charge packet. The unit of conversion sensitivity is microvolts / electron. [0003] The above is the structural mode and deficiency adopted by the CCD output node in the prior art. Based on this deficiency, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/02H01L27/06H01L23/522
Inventor 汪朝敏李仁豪
Owner THE 44TH INST OF CHINA ELECTRONICS TECH GROUP CORP
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