Epitaxial furnace tail gas cleaner
A tail gas purifier and epitaxial furnace technology, applied in chemical instruments and methods, dispersed particle separation, separation methods, etc., can solve the problems of high production cost and operation cost, large volume of tail gas purification device, and easy blockage of air inlet, etc. To achieve the effect of compact structure, low production cost and high efficiency
Active Publication Date: 2010-06-02
常州恒威净化设备有限公司
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Problems solved by technology
[0003] The technical problem to be solved by the present invention is: to solve the technical problems of the existing exhaust gas purification device, such as large volume, high production cost and operation cost, high equipment energy consumption, and easy blockage of the air inlet, the present invention provides an epitaxial furnace exhaust gas purifier , it not only has compact structure, low production cost, low equipment energy consumption, low operating cost, high exhaust gas purification efficiency, good effect, and convenient equipment maintenance
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Embodiment Construction
[0018] Such as figure 1 with figure 2The epitaxial furnace exhaust gas purifier of the present invention shown has a housing 1, a closed water tank 2 is arranged under the housing 1, a transverse partition 3 and a longitudinal partition 4 are arranged in the housing 1, and the inner cavity of the housing is divided into primary Washing room 5, secondary washing room 6 and stuffing room 7, secondary washing room 6 is arranged above the primary washing room 5, and an inspection port 24 is opened on the housing 1 of the primary washing room 5 and the secondary washing room 6. There is an air vent in the center of the partition 3, and a water seal is formed between the transverse partition 3 and the shell 1 when working, and a water seal is formed between the bottom of the primary washing chamber 5 and the bottom of the packing chamber 7 and the water tank 2 when working, and the top of the shell 1 is equipped with Air inlet 8, air inlet 8 places are equipped with slag removal m...
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The invention relates to a waste gas processing device, in particular to an epitaxial furnace exhaust gas purifier used for carrying out the purification treatment to the exhaust gas in the Epi, Ployor PECVD chemical vapor deposition process. The epitaxial furnace exhaust gas purifier has a primary washing chamber, a secondary washing chamber and a feeding chamber, the primary washing chamber isinternally provided with a spray device with a large flow nozzle, the secondary washing chamber is internally provided with a plurality of spray devices with high-speed fog nozzles, the top end of a shell is provided with an air inlet, which is led to the lower part of the primary washing chamber through an air inlet pipeline, an air outlet and a spray device with a discharging cone nozzle are provided on the top end of the feeding chamber, and the lower side of the spray device with the discharging cone nozzle is provided with a conical orifice. The epitaxial furnace exhaust gas purifier hasthe advantages of compact structure, low manufacturing cost, low equipment energy consumption, low running cost, high waste gas purification efficiency, good waste gas processing effect, convenient equipment examination and maintenance, short maintenance downtime, long equipment normal running time, good process stability and safe and reliable usage.
Description
technical field [0001] The invention relates to a waste gas treatment device, in particular to an epitaxial furnace tail gas purifier for purifying the tail gas of Epi, Ploy or PECVD chemical vapor deposition process. Background technique [0002] In Epi, Ploy or PECVD chemical vapor deposition process tail gas contains a variety of toxic waste gases, such as SiHC 3 , HCl, PH 3 etc. These toxic gases must be strictly treated to meet the emission standards before they can be discharged into the atmosphere. Some of these exhaust gases can react with water to form SiO 2 o and HCl gas, etc., while HCl and other gases and other components in the waste gas can be effectively absorbed by water. Therefore, at present, most countries such as the United States, Russia, and Japan use water-absorbing waste gas treatment systems, using water column to wash the waste gas and porous packing Absorption, most of the absorption treatment effects are not ideal, and centrifugal fans and othe...
Claims
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IPC IPC(8): B01D53/18B01D53/78
Inventor 张文光
Owner 常州恒威净化设备有限公司