Device for detecting vacuum ultraviolet spectrum
A technology of vacuum ultraviolet light and detection devices, which is applied in the directions of using diffraction elements to generate spectra, spectrum surveys, and spectrum generation. Surface and other problems, to achieve the effects of less interference, low operating environment requirements, and good time response
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0015] figure 1 Specific embodiments of the invention are given schematically. The incident slit 2, the concave grating 3, the optical fiber array 4 and a plurality of flat panel detectors 5 constitute the optical system of the vacuum ultraviolet spectrum detection device. The entrance slit 2 is parallel to the generatrices of the grating 3 . The grating 3 is a grazing incidence grating covering a wavelength range of 1-200nm and a focal length of 1000-2000mm. One end face of the fiber array 4 coincides with the Rowland circular surface determined by the incident slit 2 and the concave grating 3, covering the focal distribution of vacuum ultraviolet light incident through the slit within a certain wavelength range. The end face is also coated with a fluorescent substance that converts vacuum ultraviolet light into visible light. The other end of the fiber array 4 is bifurcated into several sub-fiber arrays, and the end faces of these sub-fiber arrays are all plane, and are r...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com