Optical element, optical film complanation method and method for manufacturing optical element
A technology for optical components and manufacturing methods, applied in optical components, optical surface grinders, optics, etc., can solve problems such as performance degradation and loss of optical films
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[0043] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Here, a reflection mirror that reflects light as an optical element will be described. figure 1 Among them, the reflection mirror 1 is mainly composed of a flat transparent substrate 10 such as a glass plate. A reflective multilayer film 12 is formed as an optical film on one surface (film formation surface 10S) of the transparent substrate 10 . From the viewpoint of ensuring the optical accuracy of the reflective multilayer film 12 , the film-forming surface 10S must be strictly maintained in planarity. Therefore, the film-forming surface 10S is mirror-polished in advance. Furthermore, the surface opposite to the film-forming surface 10S of the transparent substrate 10 is a matte surface 13 . Here, it is produced by matting with coarse-grained abrasives.
[0044] Since the reflective multilayer film 12 has internal stress (film stress), when the reflective multilayer...
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