Planning method for ion beam polishing path

Abstract

The invention discloses a method for programming an ion beam polishing path, which comprises the following steps that: first, removing function of polishing technique is determined; the polishing path and processing points on the path are determined according to a proposed helix; distribution data of surface shape errors of optical lens surface to be polished and the removing function of the ion beam polishing which are obtained from detecting are used for calculating density distribution of the staying time in polishing, and the density distribution of the staying time is used for calculating the staying time of each point on the polishing path; finally, coordinates of each point on the polishing path and the staying time of the point are used for polishing the optical lens surface to bepolished by the ion beam. The method has the advantages of ensuring that the speed of a rotating shaft of a polishing workpiece maintains constant, weakening the limit of the requirement of maximum rotating speed in processing, shortening processing time and being beneficial to enhancing polishing precision.

Description

technical field The invention belongs to the field of optical processing, in particular to an ion beam polishing process using a special processing path. Background technique In the existing ion beam polishing process, there are two basic ways of scanning the ion beam during processing: one is xy linear raster scanning, and the other is ρθ rotary helical scanning. For raster scanning, since the optical element does not perform rotary motion, only the x and y axes move, so raster scanning requires relatively large strokes of the x-axis and y-axis of the processing equipment. It is required that the stroke of the x-axis and y-axis can cover the entire optical mirror surface, and During raster scanning processing, the ion source has to turn around repeatedly, which increases the processing time. On the contrary, due to the rotary motion of the workpiece, the helical scanning reduces the stroke requirements of the x-axis and y-axis, and the ion source performs a helical motion ...

AI Technical Summary

Problems solved by technology

The advantage of the Archimedes spiral is that the spirals are equally spaced in the radial direction, that is, the radial feed is equally spaced during processing, but because the growth rate of the area enclosed by the Archimedes spiral changes, which is dA dθ = 2 πa 2 ( θ - π ) It increases with the increase of the angle, which means that the arc angle corresponding to the unit area enclosed by the helix near the center of the workpiece is larger than the arc angle corresponding to the unit area enclosed by the helix in the edge area of ​​the workpiece, Aki This feature of the Mead helix causes the workpiece to rotate slowly when processing the edge of the component, and requires the workpiece to rotate quickly when machining the center area. Since the workpiece rotation speed cannot exceed the maximum speed limit of the system, it is usually necessary to increase the processing time on the entire mirror surface. To reduce the speed of the machining center area to meet the requirements of the maximum speed limit of the system, so the processing time of the Archimedes spiral path is longer

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