Atom probes, atom probe specimens, and associated methods

An atom probe and sample technology, which is applied in the direction of material analysis, instruments, and measurement devices using wave/particle radiation, which can solve the problems of high labor intensity and long time.
CN101287983AInactive Publication Date: 2008-10-15CAMECA INSTR
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
CAMECA INSTR
Publication Date
2008-10-15
Estimated Expiration
Not applicable · inactive patent

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Abstract

The present invention relates generally to atom probes, atom probe specimens, and associated methods. For example, certain aspects are directed toward methods for analyzing a portion of a specimen that includes selecting a region of interest and moving a portion of material in a border region proximate to the region of interest so that at least a portion of the region of interest protrudes relative to at least a portion of the border region. The method further includes analyzing a portion of the region of interest. Other aspects of the invention are directed toward a method for applying photonic energy in an atom probe process by passing photonic energy through a lens system separated from a photonic device and spaced apart from the photonic device. Yet other aspects of the invention are directed toward a method for reflecting photonic energy off an outer surface of an electrode onto a specimen.
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Description

Atom Probes, Atom Probe Samples, and Related Methods Comparison of related applications This application claims priority to US Provisional Patent Application No. 60 / 709,058, filed August 16, 2005, entitled "ATOMPROBE, ATOM PROBESPECIMENS, ANDASSOCIATED METHODS," which is hereby incorporated by reference in its entirety. technical field Embodiments of the invention relate to atom probes, atom probe samples, and related methods. Background technique An atom probe (for example, an atom probe microscope) is a device that can analyze a sample at the atomic level. For example, a typical atom probe includes a sample stage, electrodes and detectors. During analysis, a sample is carried by the sample stage, and a positive charge (eg, a baseline voltage) is applied to the sample. An electrode is located between the sample and the detector and is either grounded or negatively charged. Positive electrical pulses (above baseline voltage) and / or laser pulses (eg, photon energy) ar...

Claims

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