17 results about "Atom probe" patented technology

The invention provides a neutral atom beam generation device and a neutral atom detector calibration device. The neutral atom beam generation device comprises an ion beam generation device used for emitting a mixed beam; the particle energy testing device comprises an incident end, a first emergent end, a second emergent end and an acquisition device, the incident end is used for receiving the mixed beam; the incident end is communicated with the second emergent end through an arc-shaped channel, and a deflection magnetic field is arranged at the arc-shaped channel, so that positive ions in the mixed beam flow deflect and bombard the acquisition device; the acquisition device is used for acquiring a first bombardment position of positive ions; the first emergent end is used for emitting a first ion beam; the processing device is connected with the collecting device and used for determining the deflection radius of the positive ions according to the first bombardment position and determining the energy of the positive ions and the neutral atoms according to the deflection radius; and the particle screening device is used for absorbing positive ions and negative ions in the first ion beam so as to emit a neutral atom beam.

The application provides an L-shaped direct flight type three-dimensional atom probe ultra-high vacuum system, and relates to the technical field of three-dimensional atom probes.The system comprises a sample feeding chamber, a transition chamber and an analysis chamber, and each chamber is connected to an independent vacuum pumping system.A lifting type sample storage bin is arranged in the transition chamber to temporarily store and switch the sample.A first horizontal vacuum magnetic rod and a second vertical vacuum magnetic rod intersect in the transition chamber to form an L-shaped transmission path.The second vacuum magnetic rod vertically sends the sample stage upward into the analysis chamber, so that the sample needle tip directly aims at the center of the local electrode.A high vacuum isolation valve with a gas locking device is arranged between the transition chamber and the analysis chamber.The application can eliminate the complicated mechanical alignment and calibration steps, greatly improve the sample switching and pumping efficiency, and has a quick isolation protection mechanism, thereby significantly improving the safety and reliability of the system.

There are provided techniques for analyzing an atom probe tomography data set obtained from a tip-shaped sample. The techniques include defining analysis sub-volumes in the atom probe tomography data set; performing a fast Fourier transform (FFT) on each of the analysis sub-volumes to obtain a signal in a Fourier domain; identifying at least one FFT peak in the signal in the Fourier domain, each FFT peak being indicative of an expected crystal feature in the corresponding analysis sub-volume; continuously and automatically calculating an image compression factor and a radius of the tip-shaped sample, based on identified crystal features, the identified crystal features being obtained from a collection of expected crystal features; and reconstructing a three-dimensional model of the tip-shaped sample. Said reconstructing includes comparing the identified crystal features with calibration data; and dynamically adjusting the image compression factor and the radius of the tip-shaped sample.

The disclosure is directed to techniques in preparing an atom probe tomography (“APT”) specimen. The disclosed techniques form an APT specimen or sample directly on a DUT region on a wafer. The APT specimen is formed integrally to the substrate or the support structure, e.g., a carrier, under the APT specimen. A laser patterning is conducted to form a trench in the DUT and one or more bump structures in the trench. The laser patterning is relatively coarse and forms a coarse surface texture on each of the bump structures. A low-kV gas ion milling using a dual-beam focused ion beam (“FIB”) microscopes is then conducted to shape the bump structures into APT specimen.

A positioner for analytical instruments (e.g., atom probe microscopes or other nanoscale microscopes) includes a major carriage translatable with respect to a vacuum chamber wall, and a minor carriage connected to the major carriage by multiple spaced actuators allowing the minor carriage to translate and / or tilt with respect to the major carriage. Arms then extend from the minor carriage through the vacuum chamber wall to connect to an instrument. The instrument may be rapidly extended or retracted within the vacuum chamber via its connection to the major carriage, and may be more finely translated and / or tilted via its connection to the minor carriage. A damping arrangement isolates the instrument from vibration.

A tomographic atom probe includes an analysis chamber intended to analyze a sample of material in the form of a nanotip mounted on an anti-vibration support, the nanotip being brought to a temperature of between 0 kelvin and ambient temperature, the nanotip being biased at an adjustable voltage of between 1 kV and 15 kV, the analysis chamber comprising a position-sensitive and time of flight-sensitive ion detector. The atom probe comprises a generator for generating high-peak-intensity single-cycle ultrashort terahertz pulses, the analysis chamber comprising optical means for focusing the terahertz pulses, the focusing of the terahertz pulses causing the atoms of the nanotip to evaporate through the field effect without thermal effects. The terahertz pulses are generated by a femtosecond pulsed laser emitting very high-power ultrashort optical pulses at a high rate.

The application provides a neutral atom beam generating device and a neutral atom detector calibration device. The neutral atom beam generating device comprises: an ion beam generating device for emitting a mixed beam; a particle energy testing device comprising an incident end, a first exit end, a second exit end and a collection device; the incident end is used for receiving the mixed beam; the incident end and the second exit end are communicated through an arc-shaped channel, and a deflection magnetic field is arranged at the arc-shaped channel to deflect positive ions in the mixed beam and hit the collection device; the collection device is used for obtaining a first hitting position of the positive ions; the first exit end is used for emitting a first ion beam; a processing device connected with the collection device is used for determining a deflection radius of the positive ions according to the first hitting position, and determining the energy of the positive ions and neutral atoms according to the deflection radius; and a particle screening device is used for absorbing the positive ions and negative ions in the first ion beam to emit a neutral atom beam.

A method for determining a three-dimensional atomic distribution of a sample having a tip, during an atom probe tomography process. The method accounts for the tip not being axial symmetric and not having a hemispherical shaped apex throughout the evaporation process.

The invention provides a loading device for radioactive sample TEM-3DAP combined characterization. The loading device comprises a loading sample fixing table, a sample clamping mechanism and a guide structure, the sample clamping mechanism is used for clamping an FIB carrying net with a radioactive three-dimensional atom probe tip sample; the sample clamping mechanism comprises a first clamping part and a second clamping part, the first clamping part is arranged on the second clamping part and rotates relative to the second clamping part, and the second clamping part is arranged on the loading sample fixing table, so that the sample clamping mechanism is mounted on the loading sample fixing table; the guide structure is arranged on the loading sample fixing table and is used for guiding the FIB carrying net with the radioactive three-dimensional atom probe tip sample to slide to the second clamping part. The guiding structure and the sample clamping mechanism form a guiding and positioning integrated channel, and the sample clamping mechanism rapidly clamps an FIB carrier net with a radioactive three-dimensional atom probe tip sample, so that the sample loading difficulty is greatly reduced, and the sample loading time is shortened.

The disclosure relates to the technical field of micro-analysis of materials, and provides a multifunctional sample stage for in-situ testing with transmission electron microscope (TEM) and atom probe tomography (APT). The multifunctional sample stage includes: a support stage comprising a base body, the base body having a first-step tier and a second-step tier; a metal pressing plate, wherein a first portion of the metal pressing plate is fixed to the first-step tier, and a second portion of the metal pressing plate is engageable with a silicon wafer carrying specimens disposed on the second-step tier; and a sample mounting stage assembly, which comprises a concave sample stage and a convex fixing stage, is positionable on the second-step tier, wherein a metal support grid for carrying specimens can be fixed to the sample mounting stage assembly.

The invention relates to the field of information technology resource management in cloud data processing, and discloses an information technology resource allocation system based on cloud data, which comprises the following steps: dynamically synthesizing a group of micro-pulse probes which can resonate with an application feature and comprise a plurality of atom probes according to the application feature description of a task to be deployed, the micro-pulse probe is distributed to a plurality of candidate computing nodes; according to the method and the system, the detection behavior is dynamically associated with the resource characteristics of the task to be deployed, so that the allocation decision can penetrate through the fog of the apparent velocity, and the task binding efficiency is improved. And preferential selection is carried out on the basis of evaluating the real operation stability of the nodes, so that the possibility of allocating tasks to disguised healthy nodes with hidden performance risks is avoided, and exclusive matching of calculation loads and physical resource characteristics is realized.

The application discloses a direct flight type three-dimensional atom probe ultra-high vacuum system and a sample feeding method thereof. The ultra-high vacuum system comprises a sample feeding chamber, a transition chamber and an analysis chamber, and the sample feeding chamber, the transition chamber and the analysis chamber are respectively connected with a first vacuum pumping unit, a second vacuum pumping unit and a third vacuum pumping unit. A first vacuum magnetic force rod and a sample stage capable of being lifted are horizontally arranged in the sample feeding chamber, and the first vacuum magnetic force rod is used for pushing the sample stage into the transition chamber. A second vacuum magnetic force rod is horizontally arranged in the transition chamber and used for pushing the sample stage into the analysis chamber, and the vertical position of the second vacuum magnetic force rod is aligned with the center of a local electrode area of the analysis chamber. A delay line detector is arranged in the analysis chamber, and the delay line detector is used for completing mass-to-charge ratio detection of ions obtained through field evaporation effect of sample surface atoms. Through the system, the sample needle tip can be directly aligned with the center of the local electrode area.

Reconstruction method for atom probe tomography. A method (100) for determining the three-dimensional atomic distribution of a sample (201) having a tip during an atom probe tomography process. The method accounts for the fact that the tip is not axisymmetric and does not have a hemispherical apex throughout the evaporation process.

The invention discloses a three-port undersaturated Rydberg atom probe based on nonmetal laser heating, and belongs to the field of Rydberg atom microwave electric field measurement. The device adopts a non-metal laser heating mode, so that the interference of a traditional metal heating element on a microwave electric field can be avoided, and the electromagnetic purity of a measurement environment is ensured. Meanwhile, by arranging the undersaturation three-port optical fiber alkali metal atom gas chamber, the atomic number density in the gas chamber is kept stable when the external temperature changes within a certain range by utilizing the undersaturation characteristic of the undersaturation three-port optical fiber alkali metal atom gas chamber, and meanwhile, the jitter of a spectral signal during microwave electric field measurement is reduced. Therefore, the problem that the measurement precision is affected due to the change of the number of atoms caused by temperature fluctuation of the saturated atom gas chamber is solved. The Rydberg atomic microwave electric field measuring accuracy and stability can be improved, a reliable atomic probe is provided for high-precision electric field detection, and the Rydberg atomic microwave electric field measuring device is suitable for aviation, airborne and other scenes with strict requirements for the measuring environment.

The invention provides a large-size large-opening-area-ratio micro-channel plate for a three-dimensional atom probe and a preparation method thereof, and the method comprises the following steps: matching a regular hexagonal core material rod with a regular hexagonal skin material glass tube, and carrying out monofilament drawing, multifilament rod arrangement, multifilament drawing, multifilament screen arrangement, cold processing slicing and acid-alkali corrosion to obtain the large-size large-opening-area-ratio micro-channel plate for the three-dimensional atom probe. The micro-channel MCP substrate with the orthohexagonal micro-channel is obtained; performing flaring process treatment by using etching equipment, monitoring the wall thickness change by adopting a reflectivity monitoring mode and a linear and nonlinear calibration model based on the wall thickness interval, and determining the stop of the etching process according to the wall thickness of a flaring control point to obtain a flaring MCP substrate; performing hydrogen reduction treatment to form a secondary electron emission layer; and finally, coating the input surface and the output surface of the MCP subjected to hydrogen reduction treatment by using a metal material to prepare a metal electrode film.

The invention provides a method and a device for preparing a three-dimensional atom probe tip of a geological sample with low Mohs hardness, and belongs to the technical field of material preparation. The method provided by the invention comprises the following steps: depositing a Pt protection layer in a target area; milling the periphery of the Pt protective layer on the geological sample by adopting an ion beam to form a triangular prism-shaped long-strip sample, and transferring the triangular prism-shaped long-strip sample to the silicon column; and inclining the sample table to enable the direction of the ion beam to be vertically welded on the top surface of the sample on the silicon column to be downward, determining a girdling step and size parameters of the annular ion beam, and performing multiple times of girdling on the sample on the silicon column until the sample on the silicon column is processed into a target shape. According to the method and the device for preparing the three-dimensional atom probe tip of the geological sample with low Mohs hardness, provided by the invention, the complicated girdling process can be processed by refining the girdling step and optimizing the size parameter of the annular ion beam, the preparation difficulty of the tip sample is reduced, and the operability and the success rate of sample preparation are improved.

The application provides a method and device for preparing a three-dimensional atom probe needle tip of a low-Mohs hardness geological sample, and belongs to the technical field of material preparation. The method provided by the application comprises the following steps: depositing a Pt protective layer on a target region; milling the periphery of the Pt protective layer on the geological sample by using an ion beam to form a three-prism-shaped long strip sample, and transferring the three-prism-shaped long strip sample to a silicon column; tilting a sample table to make the direction of the ion beam be perpendicular to the top surface of the sample welded on the silicon column and downward, determining the size parameters of a ring cutting step and a ring-shaped ion beam, and performing multiple ring cutting on the sample on the silicon column until the sample on the silicon column is processed into a target shape. The method and device for preparing the three-dimensional atom probe needle tip of the low-Mohs hardness geological sample can make the complex ring cutting process be streamlined, reduce the preparation difficulty of the needle tip sample, and improve the operability and success rate of sample preparation by refining the ring cutting step and optimizing the size parameters of the ring-shaped ion beam.