Method of Manufacturing Sample for Atom Probe Analysis by FIB and Focused Ion Beam Apparatus Implementing the Same

a technology of atom probe and focused ion beam, which is applied in the direction of scanning probe techniques, instruments, vacuum evaporation coating, etc., can solve the problems of difficult to analyze a fine specified site by the ap, transplantation piece in the front from the joint part flies and is lost, and achieves the effect of easy implementation of the transplanting/bonding method
US20080289954A1Inactive Publication Date: 2008-11-27HITACHI HIGH TECH SCI CORP
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
HITACHI HIGH TECH SCI CORP
Publication Date
2008-11-27
Estimated Expiration
Not applicable · inactive patent

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Abstract

A method of manufacturing a sample for an atom probe analysis of the invention is made one going through a step of manufacturing a concave / convex structure in both of a base needle and a transplantation sample piece by an etching working of an FIB, a step of jointing mutual members, and a step of bonding such that the concave / convex structure becomes a mesh form by a deposition working of the FIB.
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Description

RELATED APPLICATIONS

[0001] This application claims priority under 35 U.S.C. §119 to Japanese Patent Application No. JP2006-303500 filed on Nov. 9, 2006, the entire content of which is hereby incorporated by reference.BACKGROUND OF THE INVENTION

[0002] The present invention relates to a method of manufacturing a sample for an atom probe analysis by an FIB, and an apparatus capable of easily implementing that method.

[0003] As means capable of directly observing an atomic arrangement of a needle point, there is developed an atom probe (AP: Atom Probe) that is a composite instrument of a mass spectrometer capable of detecting a single ion and a field-ion microscope (FIM). The AP is a solitary device capable of analyzing an electronic state, the atomic arrangement and a composition distribution of the needle point. Since a field evaporation orderly proceeds in every atom layer from a surface first layer, by the AP it is possible to investigate a composition or the composition distribution of...

Claims

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