Transmission electron microscope sample table for observing three-dimensional atom probe test sample

Abstract

The invention relates to a transmission electron microscope sample table for observing a three-dimensional atom probe test sample. The transmission electron microscope sample table comprises a sample rod main body, a press part, an automatic reset device and guide rails, wherein the guide rails are connected to one end of the sample rod main body, a groove opening is formed in the end of the sample rod main body, an arc bottom groove is formed in the axial center of the groove opening, a rectangular step is arranged at the groove opening of the bottom groove, a stepped through hole is formed in the tail end of the bottom groove, the press part comprises a press block and an eccentric wheel, the eccentric wheel is used for pressing the press block, an arc groove body is formed in the press block, is symmetric to the bottom groove of the sample rod main body and has the same shape as the bottom groove, a guide boss of the press block is arranged in the stepped through hole, the automatic reset device is a spring, and the guide boss passes through the spring. The transmission electron microscope sample table is simple in structure and is convenient to process and maintain, large-angle rotation in an inclination way can be achieved, the three-dimensional atom probe test sample can be directly loaded, the transmission electron microscope sample table can be used as a three-dimensional reconstruction sample rod of a transmission electron microscope, and the acquired transmission electron microscope image can be used for directly correcting a data reconstruction result of a three-dimensional atom probe.

Description

technical field [0001] The invention relates to a transmission electron microscope sample stage for observing the three-dimensional shape and structure of a three-dimensional atom probe sample, which belongs to a three-dimensional space characterization method combining nanometer material micro-region shape, composition and atomic structure. Background technique [0002] As an important means of characterization, transmission electron microscopy is widely used in the fields of material science and life science, and is famous for "seeing with your own eyes" and "real-time observation". Transmission electron microscopy is usually used to observe the two-dimensional morphology of nanomaterials, structure projection and analysis of micro-region components. Its resolution in two-dimensional space reaches the sub-angstrom level, and the atomic column of the material structure in a specific orientation can be clearly observed. projection. With the development of super energy spect...

AI Technical Summary

Problems solved by technology

[0004] The above method is only suitable for the JEOL electron microscope in Japan, which has a small scope of application and has the following defects: (1) The operation is inconvenient. The sample installation process requires multiple hands to work at the same time. It is easy to be damaged, and the success rate is very low; (2) the sample rod cannot be tilted at a large angle, and only the two-dimensional shape of the nano-tip can be obtained, but the three-dimensional high-resolution image of the nano-tip cannot be obtained. Transmission electron microscopy and three-dimensional atomic Probe results are not true 3D space fits

Images