Three-dimensional atom probe sample preparation first-stage polishing device
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- NANJING UNIV OF SCI & TECH
- Publication Date
- 2015-03-04
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention belongs to equipment for preparing characterization material samples, in particular to a first-stage polishing equipment for three-dimensional atom probe sample preparation. Background technique
[0002] The 3D atom probe is a measurement and analysis method with atomic-level spatial resolution. Based on the principle of "field evaporation", the three-dimensional atom probe applies a strong voltage pulse or laser pulse to the sample, turning its surface atoms into ions one by one, and removes and collects them. This requires that the sample needs to be made into a needle tip with a diameter of several microns before it can be analyzed in the 3D atom probe. In the first stage of sample preparation, the rod-shaped sample needs to be roughly polished with a polishing solution to make a relatively thin needle tip. , and then to the second stage of polishing under the microscope.
[0003] For the preparation of traditional metal samples, man...