Method of preparing three-dimensional atom probe sample on powder particle

A technology of atom probes and powder particles, which is applied in the field of material preparation, can solve the problems of inability to collect valid data, inability to determine the sampling position, weak combination of particles and the matrix, etc., and achieve the goal of reducing sample preparation procedures, accurate data, and reducing fractures effect of possibility

Inactive Publication Date: 2019-12-20
NANJING UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, during the data collection process of the 3D atom probe samples obtained by the traditional method, due to the weak combination between the particles and the matrix, they are prone to breakage and...

Method used

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  • Method of preparing three-dimensional atom probe sample on powder particle
  • Method of preparing three-dimensional atom probe sample on powder particle
  • Method of preparing three-dimensional atom probe sample on powder particle

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Embodiment 1

[0077] A method for preparing a three-dimensional atom probe sample on powder particles. The method adopts a FIB / SEM dual-beam system, wherein FIB is a Focused Ion Beam, which is a focused ion beam, and SEM is a Scanning Electron Microscope, which is a scanning electron microscope; The sample in this embodiment is TiC ceramic particle reinforced reinforcement particle TiC of Al-based composite material, and the method mainly includes the following steps:

[0078] S1: using hydrochloric acid to dissolve the Al matrix and extract the TiC particles;

[0079] S2: Repeatedly wash with water and alcohol, remove the extract, and transfer the particles into alcohol;

[0080] S3: Use an ultrasonic instrument to vibrate the alcohol to disperse the particles evenly;

[0081] S4: Use a dropper to drop the suspension containing particles onto the TEM support membrane grid, and then use a drying lamp to dry;

[0082] S5: Transfer the TEM support membrane carrier grid to the nail-shaped sa...

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Abstract

The invention belongs to the field of material preparation and particularly relates to a method of preparing a three-dimensional atom probe sample on a powder particle. According to the method, the particle is transferred onto a tungsten needle point rather than a silicon base, and a focused ion beam (FIB) is adopted to prepare the three-dimensional atom probe sample directly on the particle. Through the method, the difficulty in preparation of the three-dimensional atom probe sample can be effectively lowered, and the sample preparation time is shortened to a great extent; and besides, the three-dimensional atom probe sample at an arbitrary position of the particle can be prepared selectively, it is convenient to compare element distribution in different regions of the particle, and moreaccurate data is provided for three-dimensional atom probe result analysis.

Description

technical field [0001] The invention belongs to the field of material preparation, and in particular relates to a method for preparing a three-dimensional atom probe sample on powder particles. Background technique [0002] The three-dimensional atom probe applies the principle of field evaporation. Under the conditions of ultra-high vacuum (up to 10^-11Torr) and ultra-low temperature (up to 20K), a pulse voltage or laser is applied to the tip of the needle-shaped sample to ionize and evaporate the atoms, leaving On the surface of the needle tip, use a flight mass spectrometer to determine the element type according to the mass / charge ratio of the ion, determine the original three-dimensional position of the atom according to the high-sensitivity detector, and reconstruct the distribution of the atom in the three-dimensional space through post-processing software. The three-dimensional atom probe can determine the position and type of atoms in three-dimensional space, so it ...

Claims

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Application Information

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IPC IPC(8): G01Q30/20
CPCG01Q30/20
Inventor 靳慎豹苏豪凯
Owner NANJING UNIV OF SCI & TECH
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