3DTEM and 3DAP multi-scale characterization universal sample table

Abstract

The invention belongs to the technical field of nanometer materials and discloses a 3DTEM and 3DAP multi-scale characterization universal sample table which comprises a sample table base; the tail endof the sample table base is in a rectangular shape, and the front end is in a shape of a swallow tail and form a right angle with the back end; the tail end of the sample table base is provided witha round hole; an outer copper pipe is welded to the front end of the sample table base; the front end of the outer copper pipe is sleeved with an inner copper pipe; the outer copper pipe is fixed withan inner copper pipe through a friction force; and a three-dimensional atom probe needle-like sample is clamped with the front end of the inner copper pipe. The 3DTEM and 3DAP multi-scale characterization universal sample table provided by the invention is ingenious in design, easy to disassemble, convenient to operate and relatively low in cost, can be repeatedly utilized, is easily combined with two three-dimensional atom probe needle-like sample preparation methods, enables sample preparation and electronic micro-analysis to be efficiently connected together and chemical component information of a three-dimensional atom probe and microstructure information of a three-dimensional transmission electron microscopy to be fully combined, has better applicability and can be more generally applied.

Description

technical field [0001] The invention belongs to the technical field of nanomaterials, and in particular relates to a universal sample stage for 3DTEM and 3DAP cross-scale characterization. Background technique [0002] At present, the existing technologies commonly used in the industry are as follows: As a relatively common means of electron microscopic characterization, transmission electron microscopy has been widely used in materials science and other fields. The current field of transmission electron microscopy mainly focuses on the development of three directions: "in-situ, three-dimensional, and high-resolution" , although the three-dimensional reconstruction technology under the transmission electron microscope can obtain information such as defects and crystallographic orientations in materials, it lacks elemental composition information. The three-dimensional atom probe is a three-dimensional reconstruction technology for ions, which has been used to characterize T...

AI Technical Summary

Problems solved by technology

[0003] In summary, the problems in the prior art are: The material characterization under the transmission electron microscope lacks precise element composition and distribution information in three dimensions. Due to the influence of X-ray extension in the material, the X-ray energy dispersive spectrometer attached to the ordinary transmission electron microscope cannot provide atomic scale information in three dimensions. On the other hand, although the three-dimensional atom probe has a good advantage in providing accurate element distribution, it is difficult to obtain the defect and crystallographic information in the three-dimensional space of the sample.

At present, there is a lack of a simple and easy interface to fully combine the advantages of the two characterization techniques

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