Robot for industry and collection processing device

Abstract

The invention provides an industrial robot with independent moving mechanic arms and same coordinate position at upper and lower side of the mechanic arms so as to reduce time to convey workpiece. The industrial robot of the invention has two above mechanic arms (10) that are connected in sequence of a mechanic arm portion (2) and a hand portion (3) from a base station portion (100) and move freely and flexibly while enables the hand portion (3) to face regulated direction. The mechanic arm (10A, 10B) respectively includes a driving source (4A, 4B) for flexible mechanic arms that enable the mechanic arm (10A, 10B) to extend taking a mechanic arm flexible shaft (2A, 2B) as a rotation centre, a driving source (5A, 5B) for flexible mechanic arms that enable the mechanic arm (10A, 10B) to extend taking a mechanic arm flexible shaft (3A, 3B) as a rotation centre and a connection element (13A, 13B) enabling the coordinate positions (P1, P2) at the upper and lower sides to be identical.

Description

technical field [0001] The present invention relates to an industrial robot and an integrated processing device, and more particularly, to an industrial robot capable of shortening the transport time of workpieces in an integrated processing device such as a semiconductor manufacturing device, and an integrated processing device including the industrial robot. Background technique [0002] As a semiconductor device manufacturing system, a system incorporating a workpiece transfer robot into a semiconductor device manufacturing system is used. Such manufacturing systems have multiple processing chambers that perform processing in a reduced pressure environment. In addition, the workpiece transfer robot installed in the transition chamber performs loading and unloading (hereinafter also referred to as loading / unloading) operations of semiconductor wafers with respect to a predetermined processing chamber among the plurality of processing chambers. At this time, if the inside ...

AI Technical Summary

Problems solved by technology

[0012] The robots described in the above-mentioned patent documents 1 and 2 increase productivity by driving both arms, but the driving is all using a link mechanism. When one arm is carrying in / out a workpiece, the other arm is behind it. Standby, so there is a disadvantage from the viewpoint of shortening the transportation time

[0013] In addition, the coordinate positions of the transfer tables (hand parts) on which the workpieces are placed in the above-mentioned Patent Documents 1 and 2 are shifted in the vertical direction. When the workpiece inside is carried out and then another workpiece is loaded in by the other transfer table, it is necessary to make the drive shaft of the transfer table move greatly in the up and down direction, and to make the coordinate position of the transfer table in the up and down direction and the seat of the processing chamber. Because of the operation of aligning the position of the mark, the operation mechanism is complicated, and there is a disadvantage in terms of shortening the transportation time.

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