Unlock instant, AI-driven research and patent intelligence for your innovation.

Air processing unit

A gas treatment and gas technology, applied in the field of gas treatment unit, can solve the problems such as inability to perform heat treatment operations

Active Publication Date: 2012-05-30
ESPEC CORP
View PDF1 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in the heat treatment apparatus disclosed in Japanese Patent Laid-Open Publication No. Hei 10-141868, the gas treatment section includes a heater and a blower for circulating heated air inside and outside the heat treatment chamber, and this gas treatment section The heat treatment unit is integrally installed between the outer wall of the heat treatment unit and the heat treatment chamber. Therefore, if electrical equipment such as a blower or a heater in the gas treatment unit breaks down, the heat treatment operation cannot be performed until the repair is completed.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Air processing unit
  • Air processing unit
  • Air processing unit

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0017] figure 1 This is a schematic diagram of a heat treatment apparatus according to the first embodiment of the present invention, and the heat treatment apparatus includes a gas treatment unit and a heat treatment unit connected to the gas treatment unit. The heat treatment apparatus 1A is used, for example, in a manufacturing process of a flat panel display, and is a so-called clean oven installed in a clean room.

[0018] In the heat treatment apparatus 1A, the gas treatment unit 20A is attached to the heat treatment unit 10 . The heat treatment unit 10 has a heat treatment chamber 11 for accommodating a heat-treated object (hereinafter also referred to as a workpiece) W, and the heat-treated object W can be taken out from the heat treatment chamber 11 . The gas treatment unit 20 has a gas passage 21A for introducing a heat treatment gas (eg, heating air) into the heat treatment chamber 11 of the heat treatment unit 10 , and for extracting the heat treatment gas (eg, he...

no. 2 approach

[0031] Figure 4 This is a schematic diagram of a heat treatment apparatus according to a second embodiment of the present invention, in which a gas treatment unit is connected to the heat treatment unit. exist Figure 4 in, right and figure 1 Identical components are marked with the same reference numerals.

[0032] In this heat treatment apparatus 1D, the gas treatment unit 20D of the second embodiment is attached to the heat treatment unit 10, and the structure of the gas treatment unit 20D of the second embodiment is different from that of the gas treatment unit 20A of the first embodiment. That is, the gas processing unit 20D includes a gas passage 21D having an open end 22a provided at the inlet side end of the introduction pipe 22 and an open end 24a provided at the gas outlet side end of the gas processing pipe 24 . A catalyst 30 and a heater 31 are provided in the gas processing pipe 24 , and a blower 34 and a heater 35 are provided in the introduction pipe 22 . I...

no. 3 approach

[0038] Figure 5 This is a schematic diagram of a heat treatment apparatus according to a third embodiment of the present invention, in which a gas treatment unit is connected to the heat treatment unit. exist Figure 5 in, right and Figure 4 Identical components are marked with the same reference numerals.

[0039] In the heat treatment apparatus 1C, the gas treatment unit 20C of the third embodiment is attached to the Figure 4 The heat treatment unit 10 shown is on the same heat treatment unit 10 . The gas processing unit 20C of the third embodiment differs from the gas processing unit 20D of the second embodiment in that it has the connection pipe 28 . That is, the gas processing unit 20C includes a gas passage 21C having a connecting pipe 28 for connecting the gas processing pipe 24 and the introduction pipe 22 . One end of the connection pipe 28 is connected between the position where the catalyst 30 , the heater 31 , and the blower 32 are provided in the gas proce...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a gas processing unit attached on a heat processing unit. The heat processing unit is provided with a heat processing chamber for containing the heat processed object; the contained heat processed object is taken put from the heat processing chamber; and a gas lead-in part and a gas lead-out part respectively communicated with the heat processing chamber. The gas processingunit comprises a gas channel having a lead-in tube detachably connected with the gas lead-in part through a first connecting part, a lead-out tube detachably connected with the gas lead-out part through a second connecting part; the gas channel is used for leading the gas for heat processing into the gas lead-in part and leading out from the gas led-out part; catalyst for decomposing the sublimation contained in the gas led out from the gas lead-out part; the sublimation is produced from the heat processed object; a heater at least heating the catalyst; and a blower for leading the gas for heat processing and the heat processed gas to the set direction. So, the gas processing unit is able to rapidly treat the condition of the fault caused by blower or heater and other electrical equipment.

Description

technical field [0001] The present invention relates to a gas treatment unit attached to a heat treatment unit for heat treating an object to be heat treated. Background technique [0002] A conventional heat treatment apparatus heats the heat treatment chamber accommodated in the heat treatment chamber by heating the heat treatment chamber while circulating air in the heat treatment chamber. Such a heat treatment apparatus is used, for example, in a pre-bake process and a post-bake process of a photoresist or an organic thin film in a manufacturing process of a flat panel display (FPD: Flat Display Panel). In these steps, when a heat-treated object such as a glass substrate is heat-treated, the volatile components contained in the photoresist etc. are vaporized to generate a large amount of sublimated substances, which recrystallize and scatter or adhere to the heat-treating equipment. and so on. [0003] As a countermeasure to solve the above problems, for example, Japan...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): F26B21/00
CPCF27D7/02
Inventor 手钱永充
Owner ESPEC CORP