Order reduction modeling method of micro electro-mechanical system containing considerable input ports

Abstract

The invention discloses a deflation modeling method of a micro-electronic-mechanical-system (MEMS) which contains a plurality of input ports. A three-dimension solid model of the structure is established according to the parameters of structure design, modal analysis is carried out by using a finite element method, the quality and the rigidity matrix of the structure is extracted from analysis results, and a second order dynamics action equation of the structure is converted into a first order state equation after being established; an input matrix B is uniformly splitted into k blocks by rows to obtain the state equation of the structure after splitting; deflation is carried out to the application subblock of the (i)th sub-system to obtain the macro model state equation of the (i)th sub-system; the integral macro model of the original system can be obtained after the macro models of all the sub-systems are superposed according to output. The method speeds up the MEMS system level modeling and simulation based on the macro models, thus improving the design efficiency of the MEMS.

Description

technical field The invention relates to a modeling method of a micro-electro-mechanical system (MEMS), which belongs to the field of micro-electro-mechanical system design and model reduction. Background technique With the rapid development of MEMS technology, the structure of MEMS devices has become more and more complex. It is very time-consuming and inefficient to use its original model to directly carry out system-level modeling and simulation. In order to improve the simulation efficiency, the original model is generally processed, and a certain order reduction method is adopted to greatly reduce the degree of freedom while maintaining the input and output characteristics basically unchanged, and establish a low-order model that can reflect the characteristics of the original model, also known as Macro model or polycondensation model, the degree of freedom reduction process is called the reduced-order modeling process. The state equation of the first-order linear tim...

Images