Poly-pyrrole minisize super capacitor based on MEMS technique and method for manufacturing the same
A supercapacitor and polypyrrole technology, which is applied in the direction of capacitors, electrolytic capacitors, capacitor parts, etc., can solve the problems of increased processing difficulty, reduced reliability of micro-energy devices, and complicated preparation processes, so as to increase energy density and improve large current. The effect of discharge performance
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[0022] The invention proposes a polypyrrole micro-supercapacitor based on MEMS technology and a manufacturing method thereof. The micro-supercapacitor is a two-dimensional comb-tooth planar structure consisting of an anode (positive electrode) and a cathode (negative electrode) covered with the same polypyrrole active material, filled with a gel-like solid electrolyte, and then sealed in a polyimide encapsulation layer In this paper, a polypyrrole micro-supercapacitor with the characteristics of small size, high energy storage density, high discharge power, simple structure, convenient processing, and reliable performance was obtained. The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0023] figure 1 Shown is a schematic diagram of a two-dimensional planar gold comb current collector for a micro-supercapacitor. In the figure, the comb structures of the anode gold current collector 1 and the cathode gold cur...
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