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Poly-pyrrole minisize super capacitor based on MEMS technique and method for manufacturing the same

A supercapacitor and polypyrrole technology, which is applied in the direction of capacitors, electrolytic capacitors, capacitor parts, etc., can solve the problems of increased processing difficulty, reduced reliability of micro-energy devices, and complicated preparation processes, so as to increase energy density and improve large current. The effect of discharge performance

Inactive Publication Date: 2010-05-12
TSINGHUA UNIV
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Problems solved by technology

As the number of layers increases, the preparation process becomes more complex, the processing difficulty increases significantly, and the reliability of the prepared micro-energy devices also decreases.

Method used

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  • Poly-pyrrole minisize super capacitor based on MEMS technique and method for manufacturing the same
  • Poly-pyrrole minisize super capacitor based on MEMS technique and method for manufacturing the same
  • Poly-pyrrole minisize super capacitor based on MEMS technique and method for manufacturing the same

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Embodiment Construction

[0022] The invention proposes a polypyrrole micro-supercapacitor based on MEMS technology and a manufacturing method thereof. The micro-supercapacitor is a two-dimensional comb-tooth planar structure consisting of an anode (positive electrode) and a cathode (negative electrode) covered with the same polypyrrole active material, filled with a gel-like solid electrolyte, and then sealed in a polyimide encapsulation layer In this paper, a polypyrrole micro-supercapacitor with the characteristics of small size, high energy storage density, high discharge power, simple structure, convenient processing, and reliable performance was obtained. The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0023] figure 1 Shown is a schematic diagram of a two-dimensional planar gold comb current collector for a micro-supercapacitor. In the figure, the comb structures of the anode gold current collector 1 and the cathode gold cur...

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Abstract

The invention discloses a polypyrrole minitype super capacitor in the range of the capacitor manufacturing technology based on MEMS technology and the preparation method thereof. The polypyrrole minitype super capacitor adopts the structure that a metal comb two-dimensional plane structure as a current collector is prepared on the surface of the silicon matrix by utilizing the micro-machining technology; a comb-shaped polypyrrole active electrode is prepared on the surface of the current collector by adopting the method of polypyrrole substance being prepared by the electric precipitation method; a layer of gel solid electrolyte is covered on the surface of the comb-shaped polypyrrole electrode and between a positive electrode and a negative electrode; and a layer of polyimide material iscovered on the surface of the structure to accomplish the encapsulation of the minitype super capacitor. The MEMS-based manufacturing technology has the characteristic that the process is simple, andis suitable for mass manufacture. The minitype super capacitor has the advantages of small volume, high energy storage and stable performance, and is widely applicable to micro-robot electronic intelligence systems, chemical sensors, battlefield friend-or-foe identification devices, distributed type battlefield sensors and other fields.

Description

technical field [0001] The invention belongs to the technical scope of manufacturing microcapacitors, in particular to a polypyrrole microsupercapacitor based on MEMS technology and a manufacturing method thereof for microsystems. Background technique [0002] Miniaturization, miniaturization, and integration of electronic products are the general trend of technological development in the world today. Micro Electro Mechanical Systems (MEMS for short) has the characteristics of mobility, self-control, and integration, and is one of the most important technological innovations in recent years. When a subsystem can be integrated on a chip, the power supply must also complete the revolution of miniaturization and miniaturization. MEMS micro energy system refers to the integration of one or more power supply devices into a micro system with a characteristic size of micron level and a centimeter level based on MEMS technology, which can realize long-term, high-efficiency, multi-m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01G9/042H01G9/048H01G9/025H01G9/08H01M10/00H01M14/00
CPCY02E60/13
Inventor 尤政王晓峰
Owner TSINGHUA UNIV
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