Compact wafer automatic transfer unit

Abstract

A compact wafer automatic transfer device, which overcomes the shortcomings of the existing technology that it cannot perform complex actions in the narrow space of the process, including the rack, loading platform, bellows body and arm mechanism. The technical points are: arm mechanism The lifting and stretching motors are not on the same plane. The lower arm is connected to the grasping mechanism through the translation mechanism and the turning mechanism, and the gear linkage transmission mechanism is used to drive the grasping mechanism to rotate around the axis. The grasping motor of the grasping mechanism drives the jaws to reciprocate. , The positioning mechanism on the grabbing mechanism is provided with an adjustable positioning block. Its design is reasonable, the transfer between processes runs smoothly, and the action is flexible and reliable. While completing the automatic transfer of wafers in the horizontal or vertical state within the limited travel space, it can also realize the left and right translation and flipping of the wafer cassette to adapt to the process equipment set up side by side. Automatic transmission is fully realized in a narrow space where the center distance is smaller than the center distance of the transmission equipment, and it can be flexibly stopped when encountering external interference to achieve a precisely controlled transmission effect.

Description

technical field [0001] The present invention relates to a wafer conveying device. In particular, the structure design for loading and unloading the standard mechanical interface (Standard Mechanical Interface, SMIF) wafer cassette is more compact, and its overall height is significantly reduced, leaving more space for the process equipment in the limited travel space. A compact wafer automatic transfer device that further expands the scope of application. Background technique [0002] Currently, wafer handling is critical to IC manufacturing during semiconductor manufacturing. In order to ensure the quality of the wafers during transportation between different processes and avoid the wafers from being contaminated by dust particles or other contamination, more and more transportation work uses standard transportation containers, that is, the standard mechanical interface (standard mechanical interface, referred to as SMIF) is used. )technology. For example, in US Pat. Nos...

AI Technical Summary

Problems solved by technology

[0013] The purpose of the present invention is to provide a compact wafer automatic transfer device, which can effectively overcome its structural limitations and cannot be applied in addition to inheriting the advantages of providing a clean microenvironment from the isolation technology in the SMIF in the prior art. Due to the shortcomings of complex actions in the narrow space of the process equipment, the structure design of the device is more compact, and its overall height is significantly reduced, leaving more operating space for the process equipment. The transmission operation is more stable, and the action is more flexible and reliable. Further expansion The scope of application is widened, so that it can realize the flipping of the wafer cassette in the range of 0-90 degrees in the limited travel space, and set the tilt angle at will, so as to complete the automatic transmission of the wafer in horizontal or vertical state, and at the same time realize the wafer cassette Translate left and right to adapt to automatic transmission in a narrow space where the center distance of process equipment arranged side by side is smaller than the center distance of transmission equipment, and it can be flexibly stopped when encountering external interference to achieve a precisely controlled transmission effect

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