Statistical process control method and apparatus
A technology of statistical process control and production process, applied in the direction of electrical program control, comprehensive factory control, comprehensive factory control, etc., can solve the problems of system instability, no alarm, unable to meet production needs, etc., to improve work efficiency and simplify classification Effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment approach
[0047] refer to figure 2 , an embodiment of the statistical control method of the present invention comprises the following steps:
[0048] Step S1, collecting raw data to be analyzed. In a specific implementation, data collection is performed on a large number of parameters of each process link in the production system. For example, in the production and manufacturing of wafers, the method of random sampling of the entire set of data is usually used to collect data, that is, each random sampling takes n samples from the process instead of taking n samples several times. Different acquisition methods can be used to collect various parameters.
[0049] Step S2, judge whether the data belongs to the continuous distribution type, if it belongs to the discontinuous distribution type, go to step S6, if it belongs to the continuous distribution type, go to step S3.
[0050] In a specific implementation, it may be determined whether the data belongs to the continuous distribution...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com