Statistical process control method and apparatus
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SEMICON MFG INT (SHANGHAI) CORP
- Publication Date
- 2009-07-08
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to a statistical process control method and device. Background technique
[0002] In the production department of an enterprise, a large number of products are produced or processed every day, and the performance and quality of the product are related to the lifeline of the enterprise. In order to ensure product quality, it is necessary to monitor, detect and analyze the production process in time. Statistical Process Control (SPC) is a tool for statistics and control of the production process by means of statistics. In the production process, statistical process control tools are widely used to collect and analyze the parameters in the production process, and provide them to engineers in the form of statistical signals, such as calculating the control boundary of the control chart for the sample data collected in the production process , make a control chart, histogram for analysis; or use the control circle in the control char...