Non-contact long-stroke multi-degree-of-freedom nanometer precision working table

Abstract

The invention discloses a nanometer precision working table of long stroke supported mixedly by electromagnetic drivers and a static pressure air thrust bearing, wherein the static pressure air thrustThe invention discloses a nanometer precision working table of long stroke supported mixedly by electromagnetic drivers and a static pressure air thrust bearing, wherein the static pressure air thrustbearing is realized through the adoption of one air flotation block; and four independent electromagnetic drivers and four displacement sensors are adopted. Through coordinate conversion, decoupled c bearing is realized through the adoption of one air flotation block; and four independent electromagnetic drivers and four displacement sensors are adopted. Through coordinate conversion, decoupled closed-loop control is carried out on the vertical displacement and the postures of the working table; four independent coils are adopted to be mounted on an iron core integrally processed with the worlosed-loop control is carried out on the vertical displacement and the postures of the working table; four independent coils are adopted to be mounted on an iron core integrally processed with the working table on the supporting surface of the working table, which constitutes four independent electromagnetic drivers and realizes the single-stage long-stroke multi-degree-of-freedom working table. Tking table on the supporting surface of the working table, which constitutes four independent electromagnetic drivers and realizes the single-stage long-stroke multi-degree-of-freedom working table. The working table has the advantages of simple and compact structure, non-coupling of a control system, inhibiting effect for measurement noise, no need of vacuum preloading, stable open loop of the elhe working table has the advantages of simple and compact structure, non-coupling of a control system, inhibiting effect for measurement noise, no need of vacuum preloading, stable open loop of the electromagnetic drivers and inhibiting the vibration noise of the static pressure air thrust bearing; furthermore, the precision and control performance of the working table are higher than those of theectromagnetic drivers and inhibiting the vibration noise of the static pressure air thrust bearing; furthermore, the precision and control performance of the working table are higher than those of the static pressure air thrust bearing working table; and the thermal stability and the working stability of the working table are higher than those of a magnetic suspension working table.static pressure air thrust bearing working table; and the thermal stability and the working stability of the working table are higher than those of a magnetic suspension working table.

Description

technical field [0001] The invention relates to a precision workbench, in particular to a non-contact long-stroke multi-degree-of-freedom nanometer precision workbench which uses an electromagnetic driver for closed-loop active control and a static pressure air thrust bearing mixed support. Background technique [0002] In recent years, semiconductor process technology has been continuously developed. At present, the line width of large-scale integrated circuits is only tens of nanometers. The corresponding long-stroke multi-degree-of-freedom nano-precision workbench is required in the equipment. The workbench not only needs to accurately fix the wafer at the predetermined position, but also implements small adjustments to the vertical position and attitude of the wafer, further improving the accuracy of calibration and motion control, and making the working environment more harsh. The long-stroke multi-degree-of-freedom nano-precision workbench is also widely used in ultra...

AI Technical Summary

Problems solved by technology

The coarse-static two-pole motion method and the static pressure air guide rail can only realize the single-axis translational workbench. The two-axis workbench is composed of two mutually perpendicular single-axis translational systems. In addition to the moving mass and system inertia, there are high precision requirements for processing, assembly and calibration

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