Manufacturing method of liquid crystal alignment layer

A technology of liquid crystal alignment layer and manufacturing method, which is applied in the direction of coating, metal material coating process, ion implantation plating, etc., can solve the problems that cannot be completely solved, the surface state of rubbed fabric is difficult to control, and the pretilt angle of liquid crystal molecules is inconsistent and other problems, to avoid rubbing foreign matter and mura, to avoid poor display characteristics, and to shorten production time

Inactive Publication Date: 2011-03-16
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] (1) Since the rubbing fabric rubs against the glass substrate to form orientation grooves in the rubbing process, and the surface state of the rubbing fabric is difficult to control, which easily leads to uneven orientation of the orientation grooves, resulting in inconsistent pretilt angles of liquid crystal molecules, and The pretilt angle of liquid crystal molecules is very important to the display characteristics of liquid crystal displays;
[0008] (2) The friction between the rubbing fabric and the glass substrate will cause frictional foreign matter and various poor picture quality (mura), which will affect the display characteristics of the liquid crystal display;
[0009] (3) In the above production process, the alignment film is formed by a liquid alignment liquid, so it needs to be cured. Specifically, it needs to go through two processes of pre-curing and main curing, which takes a long time
[0010] Aiming at the problems of uneven orientation, rubbing foreign matter and mura in the production process, people in the industry have provided many solutions. For example, some solutions are mentioned in the application documents of Chinese patent application No. These methods are simply improved on the basis of the original equipment or process, but cannot completely solve the problems in the traditional technology, and even increase the process flow, thereby increasing the production cost

Method used

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  • Manufacturing method of liquid crystal alignment layer
  • Manufacturing method of liquid crystal alignment layer
  • Manufacturing method of liquid crystal alignment layer

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Embodiment 1

[0098] In this embodiment, the degree of vacuum in the deposition chamber 200 is 10 -6 Torr, the glass substrate is heated from 270 to 300 °C, H 2 The flow rate is 50sccm, CH 4 The flow rate is 0.2sccm, the power of the high-frequency negative voltage 220 is 5MHz, and the gas pressure is 50×10 2 Pa; the distance between the ion gun 510 and the glass substrate 270 is 10 cm, the relative angle 530 to the glass substrate 270 is 40°, and the skew angle 540 is 3°.

[0099] Such as Figure 10 Shown, the preparation method of liquid crystal alignment layer of the present invention comprises the following steps:

[0100] (a1) A deposition chamber 200 is provided, a base 260 is provided on the anode side of the deposition chamber 200, a glass substrate 270 is provided on the base 260, and a gas distributor 230 is provided on the cathode side;

[0101] (a2) evacuate the deposition chamber 200 to a vacuum state through the exhaust hole 250 on the deposition chamber 200, and its vacuu...

Embodiment 2

[0107] In this embodiment, the degree of vacuum in the deposition chamber 200 is 10 -7 Torr, the glass substrate is heated from 270 to 450 °C, H 2 The flow rate is 500sccm, CH 4 The flow rate is 10sccm, the power of the high-frequency negative voltage 220 is 20MHz, and the gas pressure is 500×10 2 Pa; the distance between the ion gun 510 and the glass substrate 270 is 25 cm, the relative angle 530 to the glass substrate 270 is 45°, and the skew angle 540 is 7°.

[0108] The preparation method of the liquid crystal alignment layer of the present invention comprises the following steps:

[0109] (b1) Set up a deposition chamber 200, a base 260 is provided on the anode side of the deposition chamber 200, a glass substrate 270 is provided on the base 260, and a gas distributor 230 is provided on the cathode side;

[0110] (b2) The deposition chamber 200 is pumped to a vacuum state through the exhaust hole 250 on the deposition chamber 200, and its vacuum degree is 10 -7 Torr; ...

Embodiment 3

[0116] In this embodiment, the degree of vacuum in the deposition chamber 200 is 10 -6 Torr, the glass substrate is heated from 270 to 400 °C, H 2 The flow rate is 250sccm, CH 4 The flow rate is 5sccm, the power of the high-frequency negative voltage 220 is 10MHz, and the gas pressure is 100×10 2 Pa; the distance between the ion gun 510 and the glass substrate 270 is 20 cm, the relative angle 530 to the glass substrate 270 is 42.5°, and the skew angle 540 is 4°.

[0117] The preparation method of the liquid crystal alignment layer of the present invention comprises the following steps:

[0118] (c1) Set up a deposition chamber 200, a base 260 is provided on the anode side of the deposition chamber 200, a glass substrate 270 is provided on the base 260, and a gas distributor 230 is provided on the cathode side;

[0119] (c2) Evacuate the deposition chamber 200 to a vacuum state through the exhaust hole 250 on the deposition chamber 200, and its vacuum degree is 10 -6 Torr; ...

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Abstract

The invention discloses a manufacturing method of a liquid crystal alignment layer. The method comprises the following steps: (1) a deposition bin is arranged, and a glass substrate and a gas distributor are respectively arranged at both sides of the deposition bin; (2) the deposition bin is vacuumized; (3) the glass substrate is heated to the required temperature; (4) the deposition bin is filled with hydrocarbon gas and inert gas; (5) high frequency voltage is applied to the glass substrate and the gas distributor, the gas reacts under the action of the electric field and under the condition of gas pressure, and an alignment film is formed on the surface of the glass substrate; and (6) the bombarding is performed to the alignment film through an ion gun to form an alignment groove, so that a liquid crystal alignment layer is formed. The invention also discloses a manufacturing method of the other kind of liquid crystal alignment layer, and the alignment film is formed by a sputtering method and then is bombarded through the ion gun to form an alignment groove, so that a liquid crystal alignment layer is formed. The invention enables the alignment of the liquid crystal alignment layers to be more consistent to further improve the display quality of the liquid crystal display; and in addition, the manufacturing cost can be also reduced.

Description

technical field [0001] The invention relates to liquid crystal display technology, in particular to a method for manufacturing a liquid crystal alignment layer. Background technique [0002] In addition to other components such as polarizers and glass substrates, a liquid crystal display also includes a liquid crystal layer. The orientation behavior of the liquid crystal layer determines most of the optical properties of the liquid crystal display, and this orientation is determined by the orientation of the liquid crystal layer in contact with the liquid crystal layer. The layer is determined, and the alignment layer is also called a liquid crystal alignment layer. The liquid crystal alignment layer provides a pretilt angle for the liquid crystal molecules close to the surface of the liquid crystal layer, so that the liquid crystal molecules can be aligned or arranged in a specific direction on the surface. [0003] At present, the general production process of the liquid ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/1337C23C14/35C23C14/30
Inventor 路林林
Owner BOE TECH GRP CO LTD
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