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Workpiece stocker with circular configuration

A stocker and substrate technology, applied in the direction of electrical components, thin material processing, conveyor objects, etc., can solve the problem of complex storage of workpieces and masks

Active Publication Date: 2014-05-14
动力微系统公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Storage of workpieces and reticles (items hereafter) is more complicated due to cleanliness requirements

Method used

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  • Workpiece stocker with circular configuration
  • Workpiece stocker with circular configuration
  • Workpiece stocker with circular configuration

Examples

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Embodiment Construction

[0025] Stockers according to exemplary embodiments of the present invention are designed to store wafer-shaped items that are sensitive to contamination, such as semiconductor wafers and reticles. In particular, the designed hopper is configured for space-saving storage and flexible handling. In particular, the stocker is well suited for storing large quantities of 300mm or larger wafers in a small storage space under clean conditions.

[0026] In one embodiment, together with the robotic handling unit, the stocker provides a means by which items such as semiconductor wafers can be stored openly in a clean storage area. Thus, the robotic handling unit can quickly approach individual objects, pick objects from and place objects into the carrier. This open storage approach can provide high density storage with a small footprint.

[0027] Open storage can be partitioned into compartments to reduce the risk of cross-contamination. The compartment includes a storage container se...

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Abstract

An improved stocker configuration for storing workpieces in a fabrication facility is disclosed, employing workpiece compartments arranged stationarily around a robot handling assembly. The robot handler can be designed with three degrees of freedom, to improve speed, throughput and minimum minimum particle generation. In addition, the stocker storage area is stationary with the movable components are the robot assembly, thus further contributing to the cleanliness of the storage stocker. The stocker configuration can be open storage area for fast access, space saving and ease of clean air purging. The stocker configuration can provide highly dense workpiece storage, utilizing a circumferential edge gripper robot handling assembly.

Description

[0001] This application claims U.S. Patent Application Serial No. 11 / 811,372, filed June 9, 2007, and U.S. Provisional Patent Application Serial No. 11 / 811,372, filed November 15, 2006, entitled "Workpiece Stocker Having Circular Configuration" No. 60 / 859,202, and filed on June 9, 2006 entitled "Apparatus for storing contaminating plate-like objects, in particular semiconductor wafers" ("Vorrichtung zum Lagern von kontaminationsempfindlichen, plattenformigen Gegenstanden, insbesondere zum Lagern von Halbleiterwafern") German patent application 102006028057.1 and is hereby incorporated by reference. technical field [0002] The present invention relates to apparatus and methods for storing and transferring objects, and more particularly, to workpiece stocker structures, such as stockers for semiconductor wafers, reticles, or carriers. Background technique [0003] Stockers are generally installed in semiconductor equipment for temporary storage of workpieces such as wafers, f...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677
CPCY10S414/141H01L21/67769Y10S414/137H01L21/67196H01L21/67303H01L21/67766
Inventor 卢茨·莱伯斯托克
Owner 动力微系统公司
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