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Device and method for measuring built-in low-temperature pumping speed

A measuring device, cryogenic pump technology, applied in pump testing, pumps, liquid variable capacity machinery, etc., can solve problems such as not eliminating, the diffuser can not well solve the effect of imported gas jet, and the gas supply method is outdated. , to achieve the effect of improving the accuracy

Inactive Publication Date: 2009-11-11
BEIHANG UNIV
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Problems solved by technology

The disadvantage of the above two methods is that the air supply method is outdated, and it is necessary to manually adjust the needle valve and measure the number of oil dipsticks to convert the air supply volume; the diffuser fails to solve the jet effect of the introduced gas well, and does not eliminate the direction of the airflow Influence of characteristics on pumping speed measurement of built-in cryopump

Method used

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  • Device and method for measuring built-in low-temperature pumping speed
  • Device and method for measuring built-in low-temperature pumping speed
  • Device and method for measuring built-in low-temperature pumping speed

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Embodiment Construction

[0039] The present invention will be further described below in conjunction with accompanying drawing.

[0040] The device and method for measuring the pumping speed of a built-in cryogenic pump apply the concept of measuring the pumping speed of a traditional pump by the constant pressure method to the measuring of the pumping speed of a large built-in cryopump, and use the entire vacuum container as a test cover. See attached image 3 As shown, the biggest feature of this measurement method is to use a pressure reducer with a sonic nozzle to precisely adjust the volume flow rate of the introduced gas, and make the introduced gas evenly spread to the surface of the cold plate of the built-in cryopump through the diffuser (16).

[0041]After the test gas comes out of the gas cylinder (27), it is first filtered by the filter (26), and then decompressed by the pressure reducer (23), the high-pressure gas is changed to 1 standard atmospheric pressure, and the gas flows through th...

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Abstract

The invention provides a measurement device used for measuring a large built-in low-temperature pumping speed, firstly provides an unconcentrated flow device (16) of a dual-layer cylindrical structure that effectively reduces the effects of the gas jet effect on the large built-in low-temperature pumping speed, firstly applies a method (matching a pressure reducer (23) with a sonic nozzle (22) to precisely adjust the volume flow) to the field of the built-in low-temperature pumping speed measurement, provides a sonic nozzle-type gas supply device and provides a method for measuring the sonic nozzle-type large built-in low-temperature pumping speed by aiming at the gas supply mode.

Description

【Technical field】 [0001] The invention relates to a pumping speed measuring device of a built-in cryogenic pump, which belongs to the field of pumping speed measurement. 【Background technique】 [0002] The vacuum obtaining system is an effective device for obtaining a vacuum environment in a limited space (vacuum container), for less than 10 -4 Pa vacuum environment, the traditional meaning of mechanical pumps, Roots pumps or pumps has been difficult to achieve. To solve this problem, a cryopump based on the principle of condensation adsorption has emerged. The cryopump uses a low-temperature cold plate to adsorb gas molecules whose condensation temperature is higher than that of the cold plate. The larger the area of ​​the cold plate, the stronger the pumping capacity; the lower the temperature of the cold plate, the more types of gas molecules that can be extracted. Most of the early cryopumps were external, with a small cold plate area and liquid helium as the cooling m...

Claims

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Application Information

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IPC IPC(8): F04B51/00F04B37/08
Inventor 蔡国飙王文龙凌桂龙黄本诚张国舟李晓娟
Owner BEIHANG UNIV
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