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Multilayer thin film sealing technology of organic light emitting display

A light-emitting display and multi-layer thin film technology, which is applied in the fields of electric solid-state devices, semiconductor devices, semiconductor/solid-state device manufacturing, etc., can solve problems such as multiple sealants and affecting the life of OLEDs

Active Publication Date: 2011-04-06
YUNNAN NORTH OLIGHTEK OPTO ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
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AI Technical Summary

Problems solved by technology

This packaging method requires a lot of sealant, and the porosity of the sealant on the frame is easy to allow oxygen and moisture to penetrate in, thus affecting the life of the OLED.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0016] The display prepared by completing the organic light-emitting layer on a single crystal silicon wafer is sealed according to the following steps:

[0017] 1. In a high-vacuum and low-temperature environment with a pressure of 5×10-2Pa and a temperature of 130°C, atomic precipitation technology is used to form a high-density amorphous aluminum oxide film on the surface of the organic light-emitting device; aluminum trimethyltryptophan is used in the reaction And ozone as reaction gas, nitrogen as flushing gas.

[0018] 2. At pressure 5×10 -2 Pa, in a high-vacuum and low-temperature environment at a temperature of 70℃, an atomic precipitation technique is used to form a layer of amorphous tantalum oxide film on the high-density amorphous aluminum oxide film; tert-butyl imino tri-diethyl is used in the reaction Amino tantalum and ozone are used as reaction gases, and nitrogen is used as flushing gas.

[0019] 3. After the ALD technology is used for sealing, the display is furthe...

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Abstract

The invention relates to the water-oxygen isolation sealing of an organic light emitting display, in particular to a multilayer thin film sealing method of the organic light emitting display. The method is characterized in that two layers of metal oxide films and one layer of high molecular organic film are adopted for sealing the organic light emitting display. The metal oxide film can isolate water and oxygen impurities that are greatly harmful to the organic light emitting display and simultaneously prevent the oxidation of metal layer, thereby improving the corrosion resistance, obviously reducing the degeneration rate of the device, and improving the service life of the organic light emitting display.

Description

Technical field [0001] The invention relates to the field of organic light emitting technology, in particular to the water and oxygen isolation and sealing of display devices. Background technique [0002] The first problem that needs to be solved to realize the commercialization of OLED is the stable light emission of the device. Most organic substances in the OLED light-emitting layer are very sensitive to atmospheric pollutants, oxygen, and moisture. Oxygen and carbonyl compounds formed after the light-emitting layer are oxidized are effective quenchers, which will significantly reduce the luminous quantum efficiency of OLED. Even the display loses its light-emitting function. Water vapor hydrolyzes the organic layer and affects the electrical conductivity, resulting in greatly reduced stability. Similarly, since the metals used in OLED cathode materials are mostly chemically active materials, they are easily corroded in air or other atmospheres containing oxygen, especially...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/56H01L51/52
Inventor 李牧词季华夏于晓辉
Owner YUNNAN NORTH OLIGHTEK OPTO ELECTRONICS TECH
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