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108 results about "Oxygen impurity" patented technology

Chemical vapor deposition process for depositing titanium nitride films from an organometallic compound

A process for depositing titanium nitride films containing less than 5% carbon impurities and less than 10% oxygen impurities by weight via chemical vapor deposition is disclosed. Sheet resistance of the deposited films is generally be within a range of about 1 to 10 ohms per square. The deposition process takes place in a deposition chamber that has been evacuated to less than atmospheric pressure and utilizes the organometallic compound tertiary-butyltris-dimethylamido-titanium and a nitrogen source as precursors. The deposition temperature, which is dependent on the nitrogen source, is within a range of 350° C. to 700° C. The low end of the temperature range utilizes nitrogen-containing gases such as diatomic nitrogen, ammonia, hydrazine, amides and amines which have been converted to a plasma. The higher end of the temperature range relies on thermal decomposition of the nitrogen source for the production of reaction-sustaining radicals. In such a case, the use of diatomic nitrogen gas is precluded because of its high dissociation temperature. Other materials may be simultaneously incorporated in the titanium nitride films during either embodiment of the deposition process as heretofore described. For example, a titanium nitride film incorporating aluminum and having the general formula TiAIN may be deposited by introducing aluminum-containing compounds. Additionally, a titanium nitride film incorporating tungsten and having the general formula TiNW may be deposited by introducing tungsten-containing compounds.
Owner:MICRON TECH INC

Preparation method of high-purity and low-loss chalcogenide glass

The invention provides a preparation method of high-purity and low-loss chalcogenide glass, belonging to a preparation method of the chalcogenide glass. The preparation method comprises the following steps of: removing hydrocarbon impurity in the glass by taking ultra-dry gallium chloride as a purifying agent, and distilling and purifying the glass in combination with the conventional deoxidant, aluminum, magnesium or zirconium metal; placing glass mixture into a quartz ampoule to be sealed in by means of vacuum supply, founding the glass mixture in a vacuum ampoule, dynamically distilling the glass, and remelting the mixture after distilling; and effectively removing the hydrocarbon impurity in the glass by taking the ultra-dry gallium chloride as the purifying agent, so that the Mie scattering imperfection is hardly formed in the finally-obtained high-purity chalcogenide glass, and the low-loss homogeneous glass can be obtained. According to the high-purity chalcogenide glass synthesized by the preparation method provided by the invention, the minimum loss under the infrared transmission waveband is less than 0.3dB/m, and the corresponding loss of the absorption peak of the residual impurity is less than 8dB/m, so that the preparation method can be used in the field of an infrared glass optical element and an infrared optical fiber. The ultra-dry gallium chloride purifying agent can be easily obtained, and is lower in price; the carbon, hydrogen and oxygen impurities can be removed from the chalcogenide glass at high efficiency; the prepared chalcogenide glass is better in uniformity and less in light scattering.
Owner:XUZHOU NORMAL UNIVERSITY

Method for growing large-size fluoride crystals through top seed crystal kyropoulos method

The invention discloses a method for growing large-size fluoride crystals through a top seed crystal kyropoulos method. The method comprises the following steps: weighing and mixing fluoride crystals and deoxidant powder, and pressing a mixture to form a block; drying the pressed block; putting the block into a crucible, sequentially installing thermal field components and installing seed crystals; vacuumizing, and heating to smelt the material until observing that the block is molten; descending the seed crystals to contact with a melting liquid level so as to slightly melt the seed crystals, pulling seed crystal rods and growing the block on the seed crystals in a condensation manner; after finishing crystal seeding, entering a shouldering period at power reduction, maintaining the crystals rotating and keeping the crystal pulling speed in the period, gradually increasing the diameters of the crystals in an upward pulling process, and entering an isometrical growth period until the crystal growth is finished; and cooling and annealing after the crystal weight reaches the feed weight. The method is low in growth cost and short in growth period; the method is suitable for large-size fluoride crystals, and the fluoride crystals grow in a vacuum condition without oxygen impurities; and the growth process is visible and controllable, so that the crystal quality is improved.
Owner:江苏国晶光电科技有限公司

High-purity silicon carbide powder and preparation method therefor

The application discloses high-purity silicon carbide powder and a preparation method therefor and belongs to the field of preparation of semiconductor materials. The preparation method for the high-purity silicon carbide powder comprises the following steps: providing beta silicon carbide powder and/or alpha silicon carbide powder as an initial silicon carbide powder material; recrystallizing theinitial silicon carbide powder material, so as to prepare a silicon carbide polycrystalline block; and subjecting the silicon carbide polycrystalline block to decarburization purification, thereby preparing the high-purity silicon carbide powder, wherein a temperature of recrystallization is not low 2,500 DEG C. According to the high-purity silicon carbide powder and the preparation method therefor, the purity of the prepared high-purity silicon carbide powder is improved by a recrystallization method, impurity removal by a hydrometallurgy or pickling step is not required, and the high-puritysilicon carbide powder is light in pollution, low in toxicity and high in operability; by a decarburization purification step of introducing oxygen gas to pure silicon carbide powder at a temperatureof 600 DEG C to 799 DEG C, the decarburization effect of the carbonized polycrystalline block is good, the prepared high-purity silicon carbide powder is low in degree of oxidation, and the influenceon an oxygen impurity is low when the high-purity silicon carbide powder is applied to growth of silicon carbide monocrystals; and by the preparation method, the high-purity silicon carbide powder with purity not lower than 99.9999% can be prepared, and the particle size of the high-purity silicon carbide powder is controllable.
Owner:SICC CO LTD

Preparation method of high-purity and low-loss chalcogenide glass

The invention provides a preparation method of high-purity and low-loss chalcogenide glass, belonging to a preparation method of the chalcogenide glass. The preparation method comprises the following steps of: removing hydrocarbon impurity in the glass by taking ultra-dry gallium chloride as a purifying agent, and distilling and purifying the glass in combination with the conventional deoxidant, aluminum, magnesium or zirconium metal; placing glass mixture into a quartz ampoule to be sealed in by means of vacuum supply, founding the glass mixture in a vacuum ampoule, dynamically distilling the glass, and remelting the mixture after distilling; and effectively removing the hydrocarbon impurity in the glass by taking the ultra-dry gallium chloride as the purifying agent, so that the Mie scattering imperfection is hardly formed in the finally-obtained high-purity chalcogenide glass, and the low-loss homogeneous glass can be obtained. According to the high-purity chalcogenide glass synthesized by the preparation method provided by the invention, the minimum loss under the infrared transmission waveband is less than 0.3dB / m, and the corresponding loss of the absorption peak of the residual impurity is less than 8dB / m, so that the preparation method can be used in the field of an infrared glass optical element and an infrared optical fiber. The ultra-dry gallium chloride purifying agent can be easily obtained, and is lower in price; the carbon, hydrogen and oxygen impurities can be removed from the chalcogenide glass at high efficiency; the prepared chalcogenide glass is better in uniformity and less in light scattering.
Owner:XUZHOU NORMAL UNIVERSITY

Method for annealing simplified, efficient, low-cost and high-temperature superconductive long band

The invention provides a method for annealing a simplified, efficient, low-cost and high-temperature superconductive long band. The method comprises the following steps of: placing the superconductive long band to be annealed into a manual band winding machine, manually winding the band on an annealing plate, placing the annealing plate into a vacuum box type annealing oven, and annealing under an oxygen atmosphere according to annealing processes. The method has characteristics of low cost, short annealing time, high production efficiency, high temperature controlling precision, and capability of uniformly annealing each part of the superconductive long band. Furthermore, compared with the traditional non-vacuum annealing oven, the purity of the oxygen atmosphere in the annealing oven isgreatly increased through a vacuumizing method, so that adverse effects of N2, NO, NO2, CO, CO2 and other non-oxygen impurity gas in the residual air in an annealing furnace on the performance of thesuperconductive long band under the high temperature in the annealing process are avoided. By the method, the rare earth oxide second generation high-temperature superconductive band subjected to annealing treatment under the oxygen atmosphere has excellent superconductive performance.
Owner:SHANGHAI SUPERCONDUCTOR TECH CO LTD

Apparatus for preparing polysilicon through electron beam deoxygenation and preliminary ingot casting coupling, and method thereof

The invention belongs to the field of polysilicon ingot casting, and especially relates to an apparatus for preparing polysilicon through electron beam melting deoxygenation and crystal growing technology coupling, and a method thereof. The apparatus is characterized in that the top of a furnace body is connected and provided with an electron gun, the upper end of the side portion of the furnace body is provided with a gas charging valve, the lower end of the furnace body is provided with a gas discharging valve, a quartz crucible is arranged in the furnace body, the outer wall of the quartz crucible is sequentially encircled with a graphite hater and a graphite carbon felt from inside to outside, the top of the graphite carbon felt is provided with a heat insulation cover, the central position of the bottom of the quartz crucible is provided with a hole, and the bottom of the quartz crucible is provided with a water cooled copper pedestal. The method comprises the following steps: charging, and carrying out vacuum pumping; heating to completely fuse a silicon material; carrying out high pressure and beam preheating, and stopping high pressure and beam; maintaining the silicon material in a liquid state; carrying out electron beam melting deoxygenation; carrying out preliminary ingot casting crystal growth; adjusting a graphite heater to make the growth speed of silicon crystals to 1.2-1.3cm / h; and cooling, and taking the obtained polysilicon. The method realizes two technologies on the same apparatus, electron beam melting is used to remove oxygen impurities in silicon, the total energy consumption reduces by 30%, and the production efficiency increases by 40%.
Owner:青岛隆盛晶硅科技有限公司

High-thermal-conductivity silicon nitride ceramic and preparation method thereof

The invention relates to the technical field of ceramic material preparation, provides high-thermal-conductivity silicon nitride ceramic and a preparation method thereof, and solves the problem of lowthermal conductivity of silicon nitride ceramic in the prior art. The silicon nitride ceramic comprises the following components in parts by weight: 60-90 parts of silicon nitride, 8-12 parts of silicon carbide, 3-5 parts of rare earth chloride, 0.2-1 part of ytterbium fluoride, 0.5-2 parts of zirconium nitride and 5-10 parts of dispersing agent. According to the preparation method, the rare earth chloride is added, so that the sintering activity of the silicon nitride powder is improved under the condition of not additionally introducing oxygen, and densification of the silicon nitride ceramic is realized; the ytterbium fluoride can promote diffusion of Si and N and react with oxygen impurities in silicon nitride crystal lattices, so that the content of dissolved oxygen in the silicon nitride crystal lattices is effectively reduced, and the heat conductivity of silicon nitride is improved; zirconium ions in the zirconium nitride have strong affinity to oxygen and can absorb part of oxygen impurities in crystal lattices. Rare earth chloride, ytterbium fluoride and zirconium nitride are matched with one another, the size of silicon nitride grains can be increased, and oxygen impurities can be discharged.
Owner:FUJIAN HUAQING ELECTRONICS MATERIAL TECH

Crucible for polycrystalline silicon ingot, production method of crucible as well as polycrystalline silicon ingot and production method thereof

The invention provides a crucible for a polycrystalline silicon ingot with a coating structure. The crucible comprises a crucible body and the coating structure arranged on the inner surface or the inner and outer surfaces of the crucible body, wherein the crucible body comprises a base and side walls which upward extend from the base; an accommodation space is defined by the base and the side walls; the coating structure comprises impurity absorbing layers and silicon nitride layers; the impurity absorbing layers and the silicon nitride layers are sequentially and alternatively arranged to form an (AB)n arrangement form from the crucible body to the coating structure along the thickness direction; A represents the impurity absorbing layers, B represents the silicon nitride layers, and n is an integer which is greater than or equal to 1; and the A is a polycrystalline silicon powder coating of which the surface is provided with a SiO2 oxide layer, or a mixed coating of a material of which the melting point is greater than or approximates to that of crystalline silicon and surface-unoxidized polycrystalline silicon powder and/or polycrystalline silicon powder of which the surface is provided with the SiO2 oxide layer. The coating structure in the crucible can stop metal impurities and oxygen impurities in the crucible from diffusing into the crucible during ingot casting. The invention also provides a production method of the crucible and application of the crucible in the ingot casting.
Owner:JIANGXI SAI WEI LDK SOLAR HI TECH CO LTD

Purification method of electronic-grade octafluorocyclopentene

ActiveCN110483234AHigh purityMeet the requirements of electronic special gasSemi-permeable membranesOther chemical processesCyclopentenePurification methods
The invention relates to the field of fine chemical engineering, in particular to a purification method of electronic-grade octafluorocyclopentene. The method comprises the steps of rectification purification, low-temperature adsorption purification, pressurized adsorption purification and the like. According to the method, the final product octafluorocyclopentene is obtained from raw material cyclopentene which is easy to obtain by using a gas phase process. A low-temperature rectification technology is adopted, and combined with a low-temperature adsorption technology and a pressurized adsorption technology to purify the octafluorocyclopentene; modified coconut shell charcoal is used as a mesoporous low-temperature adsorbent; further separation purification is performed through membraneseparation, so that the volume concentration of a water impurity in the octafluorocyclopentene product is less than or equal to 5 ppm; the volume concentration of an oxygen impurity is less than or equal to 3.5 ppm, and the volume concentration of nitrogen which is difficult to separate in the traditional process is less than or equal to 1 ppm. The purity of the product is effectively improved, the purity of the octafluorocyclopentene product is 99.999% or above, and the requirements of semiconductor and microelectronic industries on electronic special gas are met.
Owner:ZHEJIANG BRITECH CO LTD

Method for deeply removing oxygen in hydrogen through electrocatalysis at normal temperature and pressure to obtain high-purity hydrogen

ActiveCN113460964AEfficient reductive removalLow costCellsGas treatmentChemical industryPtru catalyst
The invention relates to a method for deeply removing oxygen in hydrogen through electrocatalysis at normal temperature and pressure to obtain high-purity hydrogen; a gas diffusion electrode electrolytic tank is adopted, a catalyst is sprayed on a gas diffusion layer substrate (including electrically conductive carbon paper, the catalyst and the like) to prepare a gas diffusion electrode, and a cathode and an anode are isolated by an ion exchange membrane. Reaction gas contains oxygen impurities with a certain concentration, electrochemical performance testing is carried out by adopting a three-electrode or two-electrode system constant voltage method, and the oxygen impurities in impurity-containing hydrogen are continuously and deeply removed. By adopting the method provided by the invention, the residual concentration of oxygen can be reduced to 1 ppm or less and the purity of hydrogen can reach 99.9999% or more by regulating and controlling a proper voltage range. Compared with a traditional technology, the method can efficiently reduce and remove oxygen in hydrogen at normal temperature and normal pressure, has the obvious advantages of greenness, safety, low cost, high efficiency and the like, better meets the requirements of green chemical industry, and has a wide practical application prospect.
Owner:NORTHWESTERN POLYTECHNICAL UNIV

Preparation process of monocrystalline silicon for solar cell panel

The invention relates to a preparation process of monocrystalline silicon for a solar cell panel. The preparation process comprises the steps: charging, fusion, necking-down growth, shouldering growth, isometric growth and tail growth. According to the preparation process, monocrystalline silicon raw materials are heated at a low temperature so as to release internal stress before being sent into a crystal growth furnace, so that the dislocation generated during the crystal growth is reduced, and the crystallization quality is improved; in a fusion process, the crystal growth furnace is heated to 800-900 DEG C and is vacuumized, and argon is introduced into the crystal growth furnace, so that on the one hand, the internal stress of the monocrystalline silicon raw materials is further released, on the other hand, bubbles and oxygen impurity in the monocrystalline silicon raw materials are removed through heating and are discharged out of the crystal growth furnace together with argon, and the purity of the monocrystalline silicon raw materials is guaranteed; and monocrystalline silicon prepared by virtue of the preparation process has few internal defects, is high in crystallization quality, has relatively high photoelectric conversion efficiency when being used as the solar cell panel and simultaneously is long in service life.
Owner:界首市七曜新能源有限公司
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