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Method for removing oxygen impurities in polysilicon through electron beam continuous melting, and apparatus thereof

An electron beam smelting furnace and polysilicon technology, applied in chemical instruments and methods, silicon compounds, inorganic chemistry, etc., can solve problems such as high risk, difficult operation, poor oxygen removal effect, etc., and achieve high yield and improved Production efficiency and the effect of improving photoelectric conversion efficiency

Inactive Publication Date: 2015-05-27
青岛隆盛晶硅科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] However, in the prior art, the removal effect of oxygen element is not good
For the removal method of oxygen impurities, the invention patent CN200810070925 was retrieved, a method for reducing the content of oxygen and carbon in metal silicon. The invention adopts blowing oxygen, hydrogen and water vapor into the silicon liquid to make hydrogen and oxygen react in the silicon liquid. Local high temperature is generated to remove oxygen and carbon elements in the silicon liquid with gas discharge, but this method needs to feed oxygen and hydrogen in the molten state of silicon, the operation is difficult and dangerous, and the oxygen removal effect is not good

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  • Method for removing oxygen impurities in polysilicon through electron beam continuous melting, and apparatus thereof

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Effect test

Embodiment 1

[0027] Such as figure 1 As shown, a device for removing oxygen impurities in polysilicon by continuous electron beam smelting includes a furnace body 1, the upper part of the furnace body 1 communicates with the upper furnace cover, and a feeding mechanism 2 and an electron gun 3 are installed. The feeding mechanism 2 located in the furnace body 1 A smelting crucible 4 is provided below the feeding port, and a turning mechanism 5 is arranged at the bottom of the smelting crucible 4. The turning mechanism 5 communicates with the lower furnace cover, and a loading crucible 6 is arranged on one side of the turning mechanism in the furnace body 1.

[0028] Wherein, the melting crucible 4 is a water-cooled copper crucible with a concave melting pool. Since the energy of the electron beam melting is very high, it can easily penetrate the non-metallic crucible, so the metal copper is used as the material and the melting crucible 4 is water-cooled.

[0029] The loading crucible 6 is ...

Embodiment 2

[0031] Adopt the device of embodiment 1, carry out electron beam continuous smelting and remove oxygen impurity in polysilicon, carry out according to the following method:

[0032] (1) Material preparation: put the deoxidized polysilicon material with an oxygen content of 4-8ppmw and a particle size of 10-30mm into the feeding mechanism 2 in the electron beam melting furnace after cleaning and drying;

[0033](2) Pretreatment: Turn on the cooling water circulation of the electron beam melting furnace, vacuumize the electron beam melting furnace to below 0.05Pa; vacuumize the electron gun 3 to below 0.005Pa, and then preheat, After preheating the electron gun 3 for 10 minutes, turn off the preheating;

[0034] (3) Smelting and purification: start the feeding mechanism 2, and continuously feed materials into the melting crucible 4, when the carrying capacity in the melting crucible 4 reaches 1 / 4, close the feeding mechanism; start the electron gun 3, set the beam current of the...

Embodiment 3

[0037] Adopt the device of embodiment 1, carry out electron beam continuous smelting and remove oxygen impurity in polysilicon, carry out according to the following method:

[0038] (1) Material preparation: put the deoxidized polysilicon material with an oxygen content of 4-8ppmw and a particle size of 10-30mm into the feeding mechanism 2 in the electron beam melting furnace after cleaning and drying;

[0039] (2) Pretreatment: Turn on the cooling water circulation of the electron beam melting furnace, vacuumize the electron beam melting furnace to below 0.05Pa; vacuumize the electron gun 3 to below 0.005Pa, and then preheat, After preheating the electron gun 3 for 15 minutes, turn off the preheating;

[0040] (3) Smelting and purification: start the feeding mechanism 2, and continue to feed materials into the melting crucible 4, when the load capacity in the melting crucible 4 reaches 1 / 3, close the feeding mechanism; start the electron gun 3, set the beam current of the ele...

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Abstract

The invention belongs to the field of polysilicon purification, and concretely relates to a method for removing oxygen impurities in polysilicon through electron beam continuous melting, and an apparatus thereof. A traditional oxygen removal mode is broken, and electron beam melting is adopted to remove oxygen in order to solve the removal problem of impurity oxygen in the polysilicon. An overturning mechanism and a loading crucible are arranged to guarantee the semi-continuous production of electron beam melting oxygen removal and high output per furnace. The method and the apparatus have the following advantages: 1, electron beam bombardment melting is carried out for 5-15min to make the oxygen content lower than 0.0571ppmw and solar battery's requirements on the oxygen content of polysilicon cast ingots met; 2, the photoelectric conversion efficiency of battery slices is above 0.1% higher than that of polysilicon obtained without an oxygen removal technology; and 3, continuous production is realized, and the production efficiency increases by above 35%.

Description

technical field [0001] The invention belongs to the field of polysilicon purification, in particular to a method and a device for removing oxygen impurities in polysilicon by electron beam continuous smelting. Background technique [0002] At present, my country has become the world's largest energy production and consumption country, but the per capita energy consumption level is still very low. With the continuous development of the economy and society, my country's energy demand will continue to grow. In response to the current energy shortage, countries around the world are thinking deeply, and are working hard to improve energy efficiency, promote the development and application of renewable energy, and reduce the impact on energy consumption. Reliance on imported oil enhances energy security. [0003] As one of the important development directions of renewable energy, solar photovoltaic power generation has developed rapidly in recent years, and its proportion is incre...

Claims

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Application Information

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IPC IPC(8): C01B33/037
Inventor 王登科姜大川安广野郭校亮谭毅
Owner 青岛隆盛晶硅科技有限公司
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